Micromaterials: III: Microelemtent Fabrication Technology

Tanemasa Asano

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)208-214
Number of pages7
JournalZairyo/Journal of the Society of Materials Science, Japan
Volume47
Issue number2
DOIs
Publication statusPublished - Jan 1 1998
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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