Micromaterials: III: Microelemtent Fabrication Technology

Tanemasa Asano

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)208-214
Number of pages7
JournalZairyo/Journal of the Society of Materials Science, Japan
Volume47
Issue number2
DOIs
Publication statusPublished - Jan 1 1998
Externally publishedYes

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Fabrication
fabrication

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Micromaterials : III: Microelemtent Fabrication Technology. / Asano, Tanemasa.

In: Zairyo/Journal of the Society of Materials Science, Japan, Vol. 47, No. 2, 01.01.1998, p. 208-214.

Research output: Contribution to journalArticle

@article{cd0b61bfffec4975ba2cca56ea785c46,
title = "Micromaterials: III: Microelemtent Fabrication Technology",
author = "Tanemasa Asano",
year = "1998",
month = "1",
day = "1",
doi = "10.2472/jsms.47.208",
language = "English",
volume = "47",
pages = "208--214",
journal = "Zairyo/Journal of the Society of Materials Science, Japan",
issn = "0514-5163",
publisher = "公益社団法人 日本材料学会",
number = "2",

}

TY - JOUR

T1 - Micromaterials

T2 - III: Microelemtent Fabrication Technology

AU - Asano, Tanemasa

PY - 1998/1/1

Y1 - 1998/1/1

UR - http://www.scopus.com/inward/record.url?scp=85024719350&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85024719350&partnerID=8YFLogxK

U2 - 10.2472/jsms.47.208

DO - 10.2472/jsms.47.208

M3 - Article

AN - SCOPUS:85024719350

VL - 47

SP - 208

EP - 214

JO - Zairyo/Journal of the Society of Materials Science, Japan

JF - Zairyo/Journal of the Society of Materials Science, Japan

SN - 0514-5163

IS - 2

ER -