@article{72e8033eba1f42b1b50108367d9905a5,
title = "Microprocesses and nanotechnology",
author = "Masao Nagase and Seiji Akita and Yasuaki Ishikawa and Reo Kometani and Daiyu Kondo and Seiji Nagahara and Takahiro Namazu and Takeo Ohno and Shozo Shingubara and Seiichi Takami and Koichi Takase and Masaaki Tanemura and Keiko Tawa and Kazuya Terabe and Toshiyuki Tsuchiya and Takeshi Yanagida and Atsushi Yokoo",
year = "2016",
month = jun,
doi = "10.7567/JJAP.55.06G001",
language = "English",
volume = "55",
journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",
issn = "0021-4922",
publisher = "Institute of Physics",
number = "6",
}