Microscopic laser interferometry to measure the displacement of micromechanical objects

Hirotaka Sugiura, Shinya Sakuma, Fumihito Arai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper proposed a method to measure the displacement of micromechanical components moving on the focal plane of optical microscopy. This method is based on the interferometric analysis using the laser system and the grating fabricated on the micromechanical components. The advantage of this method is its high measurement speed, accuracy and the simplicity of the configuration. We demonstrated to measure the displacement of oscillatory body at the speed of 50 kHz and within the noise of 35 nm. This method will be a promising option to measure and control the translational motion of the micromechanical devices at high frequency domain.

Original languageEnglish
Title of host publicationMHS 2018 - 2018 29th International Symposium on Micro-NanoMechatronics and Human Science
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781538667927
DOIs
Publication statusPublished - Dec 2018
Externally publishedYes
Event29th International Symposium on Micro-NanoMechatronics and Human Science, MHS 2018 - Nagoya, Japan
Duration: Dec 10 2018Dec 12 2018

Publication series

NameMHS 2018 - 2018 29th International Symposium on Micro-NanoMechatronics and Human Science

Conference

Conference29th International Symposium on Micro-NanoMechatronics and Human Science, MHS 2018
CountryJapan
CityNagoya
Period12/10/1812/12/18

All Science Journal Classification (ASJC) codes

  • Human-Computer Interaction
  • Artificial Intelligence
  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Control and Optimization
  • Instrumentation

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