Microscopic laser interferometry to measure the displacement of micromechanical objects

Hirotaka Sugiura; Shinya Sakuma; Fumihito Arai

doi:10.1109/MHS.2018.8887048

Microscopic laser interferometry to measure the displacement of micromechanical objects

Hirotaka Sugiura, Shinya Sakuma, Fumihito Arai

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper proposed a method to measure the displacement of micromechanical components moving on the focal plane of optical microscopy. This method is based on the interferometric analysis using the laser system and the grating fabricated on the micromechanical components. The advantage of this method is its high measurement speed, accuracy and the simplicity of the configuration. We demonstrated to measure the displacement of oscillatory body at the speed of 50 kHz and within the noise of 35 nm. This method will be a promising option to measure and control the translational motion of the micromechanical devices at high frequency domain.

Original language	English
Title of host publication	MHS 2018 - 2018 29th International Symposium on Micro-NanoMechatronics and Human Science
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781538667927
DOIs	https://doi.org/10.1109/MHS.2018.8887048
Publication status	Published - Dec 2018
Externally published	Yes
Event	29th International Symposium on Micro-NanoMechatronics and Human Science, MHS 2018 - Nagoya, Japan Duration: Dec 10 2018 → Dec 12 2018

Publication series

Name	MHS 2018 - 2018 29th International Symposium on Micro-NanoMechatronics and Human Science

Conference

Conference	29th International Symposium on Micro-NanoMechatronics and Human Science, MHS 2018
Country/Territory	Japan
City	Nagoya
Period	12/10/18 → 12/12/18

All Science Journal Classification (ASJC) codes

Human-Computer Interaction
Artificial Intelligence
Electrical and Electronic Engineering
Mechanical Engineering
Control and Optimization
Instrumentation

Access to Document

10.1109/MHS.2018.8887048

Cite this

Sugiura, H., Sakuma, S., & Arai, F. (2018). Microscopic laser interferometry to measure the displacement of micromechanical objects. In MHS 2018 - 2018 29th International Symposium on Micro-NanoMechatronics and Human Science [8887048] (MHS 2018 - 2018 29th International Symposium on Micro-NanoMechatronics and Human Science). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MHS.2018.8887048

Microscopic laser interferometry to measure the displacement of micromechanical objects. / Sugiura, Hirotaka; Sakuma, Shinya; Arai, Fumihito.
MHS 2018 - 2018 29th International Symposium on Micro-NanoMechatronics and Human Science. Institute of Electrical and Electronics Engineers Inc., 2018. 8887048 (MHS 2018 - 2018 29th International Symposium on Micro-NanoMechatronics and Human Science).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Sugiura, H, Sakuma, S & Arai, F 2018, Microscopic laser interferometry to measure the displacement of micromechanical objects. in MHS 2018 - 2018 29th International Symposium on Micro-NanoMechatronics and Human Science., 8887048, MHS 2018 - 2018 29th International Symposium on Micro-NanoMechatronics and Human Science, Institute of Electrical and Electronics Engineers Inc., 29th International Symposium on Micro-NanoMechatronics and Human Science, MHS 2018, Nagoya, Japan, 12/10/18. https://doi.org/10.1109/MHS.2018.8887048

Sugiura H, Sakuma S, Arai F. Microscopic laser interferometry to measure the displacement of micromechanical objects. In MHS 2018 - 2018 29th International Symposium on Micro-NanoMechatronics and Human Science. Institute of Electrical and Electronics Engineers Inc. 2018. 8887048. (MHS 2018 - 2018 29th International Symposium on Micro-NanoMechatronics and Human Science). doi: 10.1109/MHS.2018.8887048

Sugiura, Hirotaka ; Sakuma, Shinya ; Arai, Fumihito. / Microscopic laser interferometry to measure the displacement of micromechanical objects. MHS 2018 - 2018 29th International Symposium on Micro-NanoMechatronics and Human Science. Institute of Electrical and Electronics Engineers Inc., 2018. (MHS 2018 - 2018 29th International Symposium on Micro-NanoMechatronics and Human Science).

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title = "Microscopic laser interferometry to measure the displacement of micromechanical objects",

abstract = "This paper proposed a method to measure the displacement of micromechanical components moving on the focal plane of optical microscopy. This method is based on the interferometric analysis using the laser system and the grating fabricated on the micromechanical components. The advantage of this method is its high measurement speed, accuracy and the simplicity of the configuration. We demonstrated to measure the displacement of oscillatory body at the speed of 50 kHz and within the noise of 35 nm. This method will be a promising option to measure and control the translational motion of the micromechanical devices at high frequency domain.",

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note = "Funding Information: This work is supported by Grants-in-Aid for scientific research number 18H03762, Grant-in-Aid for JSPS Research Fellow number 16J11482.; 29th International Symposium on Micro-NanoMechatronics and Human Science, MHS 2018 ; Conference date: 10-12-2018 Through 12-12-2018",

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N2 - This paper proposed a method to measure the displacement of micromechanical components moving on the focal plane of optical microscopy. This method is based on the interferometric analysis using the laser system and the grating fabricated on the micromechanical components. The advantage of this method is its high measurement speed, accuracy and the simplicity of the configuration. We demonstrated to measure the displacement of oscillatory body at the speed of 50 kHz and within the noise of 35 nm. This method will be a promising option to measure and control the translational motion of the micromechanical devices at high frequency domain.

AB - This paper proposed a method to measure the displacement of micromechanical components moving on the focal plane of optical microscopy. This method is based on the interferometric analysis using the laser system and the grating fabricated on the micromechanical components. The advantage of this method is its high measurement speed, accuracy and the simplicity of the configuration. We demonstrated to measure the displacement of oscillatory body at the speed of 50 kHz and within the noise of 35 nm. This method will be a promising option to measure and control the translational motion of the micromechanical devices at high frequency domain.

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Microscopic laser interferometry to measure the displacement of micromechanical objects

Abstract

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All Science Journal Classification (ASJC) codes

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