Fingerprint Dive into the research topics of 'Microstructure and strain distribution in freestanding Si membrane strained by Si<sub>x</sub>N<sub>y</sub> deposition'. Together they form a unique fingerprint.
- Sort by
- Weight
- Alphabetically
Microstructure and strain distribution in freestanding Si membrane strained by SixNy deposition
Hongye Gao, Ken Ichi Ikeda, Satoshi Hata, Hideharu Nakashima, Dong Wang, Hiroshi Nakashima
Research output: Contribution to journal › Article › peer-review
1
Citation
(Scopus)