Microstructure of AlN grown on a nucleation layer on a sapphire substrate

Reina Miyagawa, Shibo Yang, Hideto Miyake, Kazumasa Hiramatsu, Takaaki Kuwahara, Masatoshi Mitsuhara, Noriyuki Kuwano

Research output: Contribution to journalArticlepeer-review

34 Citations (Scopus)

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Engineering & Materials Science

Physics & Astronomy