Mode selective probing method of micro trench structure using optically trapped probe

Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi, Taisuke Washitani

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Probing techniques using the optically trapped probe with selective mode such as circular motion mode and SWS sensing mode are presented. The feasibility of both probing modes is confirmed by dimensional measurements of micro trench structure which is performed using the originally developed measurement system based on a CMM.

Original languageEnglish
Title of host publication2012 International Symposium on Optomechatronic Technologies, ISOT 2012
DOIs
Publication statusPublished - Dec 1 2012
Externally publishedYes
Event2012 International Symposium on Optomechatronic Technologies, ISOT 2012 - Paris, France
Duration: Oct 29 2012Oct 31 2012

Publication series

Name2012 International Symposium on Optomechatronic Technologies, ISOT 2012

Other

Other2012 International Symposium on Optomechatronic Technologies, ISOT 2012
CountryFrance
CityParis
Period10/29/1210/31/12

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Mechanical Engineering

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  • Cite this

    Takaya, Y., Michihata, M., Hayashi, T., & Washitani, T. (2012). Mode selective probing method of micro trench structure using optically trapped probe. In 2012 International Symposium on Optomechatronic Technologies, ISOT 2012 [6403241] (2012 International Symposium on Optomechatronic Technologies, ISOT 2012). https://doi.org/10.1109/ISOT.2012.6403241