Modeling carbon coverage on polar GaN surfaces during MOVPE

Daichi Yosho, Yuya Inatomi, Yoshihiro Kangawa

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)


Carbon coverage on polar GaN surfaces during MOVPE were calculated by a theoretical model which incorporates configurational entropy. Generally, surface reconstruction with the lowest energy was explored by an ab initio-based approach. On the other hand, appearance probability of the other surfaces can be discussed by the model. Therefore, coverage of minor elements on the surfaces can be analyzed. In this research, influence of source gas ratio, total pressure, and carrier gas ratio of MOVPE conditions on the carbon coverage on the surfaces was revealed theoretically. Furthermore, orientation dependence of carbon coverage and its incorporation mechanism were discussed.

Original languageEnglish
Article number048002
JournalJapanese journal of applied physics
Issue number4
Publication statusPublished - Apr 1 2020

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)


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