Modeling of the electron motion in a capacitively coupled magnetic null plasma

Youl Moon Sung, Yaw Okraku-Yirenkyi, Masahisa Otsubo, Chikahisa Honda, Kiichiro Uchino, Katsunori Muraoka

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

A new type of plasma system based on the neutral loop discharge (NLD) concept is being developed for research aimed at sputtering application. This system is characterized by plasma production around the multinull magnetic field on the target surface, where a capacitive RF electric field is applied. From the results of the electron motion modeling in this system, we found that electrons around the magnetic null region on the target surface moved in meandering orbits like in the original NLD concept. Initial modeling results on electron behavior and a photograph of plasma emission taken from the new NLD system are presented.

Original languageEnglish
Pages (from-to)142-143
Number of pages2
JournalIEEE Transactions on Plasma Science
Volume30
Issue number1 I
DOIs
Publication statusPublished - Feb 1 2002

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All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)
  • Condensed Matter Physics

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