TY - JOUR
T1 - Modeling of the electron motion in a capacitively coupled magnetic null plasma
AU - Sung, Youl Moon
AU - Okraku-Yirenkyi, Yaw
AU - Otsubo, Masahisa
AU - Honda, Chikahisa
AU - Uchino, Kiichiro
AU - Muraoka, Katsunori
PY - 2002/2
Y1 - 2002/2
N2 - A new type of plasma system based on the neutral loop discharge (NLD) concept is being developed for research aimed at sputtering application. This system is characterized by plasma production around the multinull magnetic field on the target surface, where a capacitive RF electric field is applied. From the results of the electron motion modeling in this system, we found that electrons around the magnetic null region on the target surface moved in meandering orbits like in the original NLD concept. Initial modeling results on electron behavior and a photograph of plasma emission taken from the new NLD system are presented.
AB - A new type of plasma system based on the neutral loop discharge (NLD) concept is being developed for research aimed at sputtering application. This system is characterized by plasma production around the multinull magnetic field on the target surface, where a capacitive RF electric field is applied. From the results of the electron motion modeling in this system, we found that electrons around the magnetic null region on the target surface moved in meandering orbits like in the original NLD concept. Initial modeling results on electron behavior and a photograph of plasma emission taken from the new NLD system are presented.
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U2 - 10.1109/TPS.2002.1003964
DO - 10.1109/TPS.2002.1003964
M3 - Article
AN - SCOPUS:0036478281
VL - 30
SP - 142
EP - 143
JO - IEEE Transactions on Plasma Science
JF - IEEE Transactions on Plasma Science
SN - 0093-3813
IS - 1 I
ER -