Modeling of the electron motion in a capacitively coupled magnetic null plasma

Youl Moon Sung, Yaw Okraku-Yirenkyi, Masahisa Otsubo, Chikahisa Honda, Kiichiro Uchino, Katsunori Muraoka

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

A new type of plasma system based on the neutral loop discharge (NLD) concept is being developed for research aimed at sputtering application. This system is characterized by plasma production around the multinull magnetic field on the target surface, where a capacitive RF electric field is applied. From the results of the electron motion modeling in this system, we found that electrons around the magnetic null region on the target surface moved in meandering orbits like in the original NLD concept. Initial modeling results on electron behavior and a photograph of plasma emission taken from the new NLD system are presented.

Original languageEnglish
Pages (from-to)142-143
Number of pages2
JournalIEEE Transactions on Plasma Science
Volume30
Issue number1 I
DOIs
Publication statusPublished - Feb 1 2002

Fingerprint

electrons
photographs
sputtering
orbits
electric fields
magnetic fields

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)
  • Condensed Matter Physics

Cite this

Modeling of the electron motion in a capacitively coupled magnetic null plasma. / Sung, Youl Moon; Okraku-Yirenkyi, Yaw; Otsubo, Masahisa; Honda, Chikahisa; Uchino, Kiichiro; Muraoka, Katsunori.

In: IEEE Transactions on Plasma Science, Vol. 30, No. 1 I, 01.02.2002, p. 142-143.

Research output: Contribution to journalArticle

Sung, Youl Moon ; Okraku-Yirenkyi, Yaw ; Otsubo, Masahisa ; Honda, Chikahisa ; Uchino, Kiichiro ; Muraoka, Katsunori. / Modeling of the electron motion in a capacitively coupled magnetic null plasma. In: IEEE Transactions on Plasma Science. 2002 ; Vol. 30, No. 1 I. pp. 142-143.
@article{89e23a08840f48399eb1c67b4ec962de,
title = "Modeling of the electron motion in a capacitively coupled magnetic null plasma",
abstract = "A new type of plasma system based on the neutral loop discharge (NLD) concept is being developed for research aimed at sputtering application. This system is characterized by plasma production around the multinull magnetic field on the target surface, where a capacitive RF electric field is applied. From the results of the electron motion modeling in this system, we found that electrons around the magnetic null region on the target surface moved in meandering orbits like in the original NLD concept. Initial modeling results on electron behavior and a photograph of plasma emission taken from the new NLD system are presented.",
author = "Sung, {Youl Moon} and Yaw Okraku-Yirenkyi and Masahisa Otsubo and Chikahisa Honda and Kiichiro Uchino and Katsunori Muraoka",
year = "2002",
month = "2",
day = "1",
doi = "10.1109/TPS.2002.1003964",
language = "English",
volume = "30",
pages = "142--143",
journal = "IEEE Transactions on Plasma Science",
issn = "0093-3813",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "1 I",

}

TY - JOUR

T1 - Modeling of the electron motion in a capacitively coupled magnetic null plasma

AU - Sung, Youl Moon

AU - Okraku-Yirenkyi, Yaw

AU - Otsubo, Masahisa

AU - Honda, Chikahisa

AU - Uchino, Kiichiro

AU - Muraoka, Katsunori

PY - 2002/2/1

Y1 - 2002/2/1

N2 - A new type of plasma system based on the neutral loop discharge (NLD) concept is being developed for research aimed at sputtering application. This system is characterized by plasma production around the multinull magnetic field on the target surface, where a capacitive RF electric field is applied. From the results of the electron motion modeling in this system, we found that electrons around the magnetic null region on the target surface moved in meandering orbits like in the original NLD concept. Initial modeling results on electron behavior and a photograph of plasma emission taken from the new NLD system are presented.

AB - A new type of plasma system based on the neutral loop discharge (NLD) concept is being developed for research aimed at sputtering application. This system is characterized by plasma production around the multinull magnetic field on the target surface, where a capacitive RF electric field is applied. From the results of the electron motion modeling in this system, we found that electrons around the magnetic null region on the target surface moved in meandering orbits like in the original NLD concept. Initial modeling results on electron behavior and a photograph of plasma emission taken from the new NLD system are presented.

UR - http://www.scopus.com/inward/record.url?scp=0036478281&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0036478281&partnerID=8YFLogxK

U2 - 10.1109/TPS.2002.1003964

DO - 10.1109/TPS.2002.1003964

M3 - Article

VL - 30

SP - 142

EP - 143

JO - IEEE Transactions on Plasma Science

JF - IEEE Transactions on Plasma Science

SN - 0093-3813

IS - 1 I

ER -