Modeling of the electron motion in a capacitively coupled magnetic null plasma

Youl Moon Sung; Yaw Okraku-Yirenkyi; Masahisa Otsubo; Chikahisa Honda; Kiichiro Uchino; Katsunori Muraoka

doi:10.1109/TPS.2002.1003964

Modeling of the electron motion in a capacitively coupled magnetic null plasma

Youl Moon Sung, Yaw Okraku-Yirenkyi, Masahisa Otsubo, Chikahisa Honda, Kiichiro Uchino, Katsunori Muraoka

Electrical Engineering Sciences

Research output: Contribution to journal › Article

8 Citations (Scopus)

Abstract

A new type of plasma system based on the neutral loop discharge (NLD) concept is being developed for research aimed at sputtering application. This system is characterized by plasma production around the multinull magnetic field on the target surface, where a capacitive RF electric field is applied. From the results of the electron motion modeling in this system, we found that electrons around the magnetic null region on the target surface moved in meandering orbits like in the original NLD concept. Initial modeling results on electron behavior and a photograph of plasma emission taken from the new NLD system are presented.

Original language	English
Pages (from-to)	142-143
Number of pages	2
Journal	IEEE Transactions on Plasma Science
Volume	30
Issue number	1 I
DOIs	https://doi.org/10.1109/TPS.2002.1003964
Publication status	Published - Feb 1 2002

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All Science Journal Classification (ASJC) codes

Physics and Astronomy(all)
Condensed Matter Physics

Cite this

Sung, Y. M., Okraku-Yirenkyi, Y., Otsubo, M., Honda, C., Uchino, K., & Muraoka, K. (2002). Modeling of the electron motion in a capacitively coupled magnetic null plasma. IEEE Transactions on Plasma Science, 30(1 I), 142-143. https://doi.org/10.1109/TPS.2002.1003964

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10.1109/TPS.2002.1003964