Molecular-dynamics simulations of nucleation and growth of crystalline Si films during ELA processes

T. Endo, T. Warabisako, Shinji Munetoh, T. Motooka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Initial stage of the nucleation and growth of crystallizing Si in a rapid cooling process like ELA is discussed by using molecular-dynamics simulations. A new simulation technique is introduced to exclude artificial temperature control and to realize pseudo-natural cooling conditions, which enables us to visualize the behavior of Si atoms under a more natural condition. Based on a statistical analysis of the atomic movements, it is suggested that Si nucleation and growth occur in an amorphous-like or a low-density liquid phase rather than the supercooled liquid as has been generally accepted so far.

Original languageEnglish
Title of host publicationIDW/AD'05 - Proceedings of the 12th International Display Workshops in Conjunction with Asia Display 2005
Pages969-972
Number of pages4
Edition2
Publication statusPublished - 2005
EventIDW/AD'05 - 12th International Display Workshops in Conjunction with Asia Display 2005 - Takamatsu, Japan
Duration: Dec 6 2005Dec 9 2005

Other

OtherIDW/AD'05 - 12th International Display Workshops in Conjunction with Asia Display 2005
CountryJapan
CityTakamatsu
Period12/6/0512/9/05

Fingerprint

Molecular dynamics
Nucleation
Crystalline materials
Cooling
Computer simulation
Liquids
Temperature control
Statistical methods
Atoms

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Endo, T., Warabisako, T., Munetoh, S., & Motooka, T. (2005). Molecular-dynamics simulations of nucleation and growth of crystalline Si films during ELA processes. In IDW/AD'05 - Proceedings of the 12th International Display Workshops in Conjunction with Asia Display 2005 (2 ed., pp. 969-972)

Molecular-dynamics simulations of nucleation and growth of crystalline Si films during ELA processes. / Endo, T.; Warabisako, T.; Munetoh, Shinji; Motooka, T.

IDW/AD'05 - Proceedings of the 12th International Display Workshops in Conjunction with Asia Display 2005. 2. ed. 2005. p. 969-972.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Endo, T, Warabisako, T, Munetoh, S & Motooka, T 2005, Molecular-dynamics simulations of nucleation and growth of crystalline Si films during ELA processes. in IDW/AD'05 - Proceedings of the 12th International Display Workshops in Conjunction with Asia Display 2005. 2 edn, pp. 969-972, IDW/AD'05 - 12th International Display Workshops in Conjunction with Asia Display 2005, Takamatsu, Japan, 12/6/05.
Endo T, Warabisako T, Munetoh S, Motooka T. Molecular-dynamics simulations of nucleation and growth of crystalline Si films during ELA processes. In IDW/AD'05 - Proceedings of the 12th International Display Workshops in Conjunction with Asia Display 2005. 2 ed. 2005. p. 969-972
Endo, T. ; Warabisako, T. ; Munetoh, Shinji ; Motooka, T. / Molecular-dynamics simulations of nucleation and growth of crystalline Si films during ELA processes. IDW/AD'05 - Proceedings of the 12th International Display Workshops in Conjunction with Asia Display 2005. 2. ed. 2005. pp. 969-972
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