Monolithic-integrated microlaser encoder

Renshi Sawada, Eiji Higurashi, Takahiro Ito, Osamu Ohguchi, Mieko Tsubamoto

    Research output: Contribution to journalArticlepeer-review

    18 Citations (Scopus)

    Abstract

    We have developed an extremely small integrated microencoder whose sides are less than 1mmlong. It is 1/100 the size of conventional encoders. This microencoder consists of a laser diode, monolithic photodiodes, and fluorinated polyimide waveguides with total internal reflection mirrors. The instrument can measure the relative displacement between a grating scale and the encoder with a resolution of the order of 0.01 mm; it can also determine the direction in which the scale is moving. By using the two beams that were emitted from the two etched mirrors of the laser diode, by monolithic integration of the waveguide and photodiodes, and by fabrication of a step at the edge of the waveguide, we were able to eliminate conventional bulky optical components such as the beam splitter, the quarter-wavelength plate, bulky mirrors, and bulky photodetectors.

    Original languageEnglish
    Pages (from-to)6866-6873
    Number of pages8
    JournalApplied Optics
    Volume38
    Issue number33
    DOIs
    Publication statusPublished - Nov 20 1999

    All Science Journal Classification (ASJC) codes

    • Atomic and Molecular Physics, and Optics
    • Engineering (miscellaneous)
    • Electrical and Electronic Engineering

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