Monolithic-integrated microlaser encoder

Renshi Sawada, Eiji Higurashi, Takahiro Ito, Osamu Ohguchi, Mieko Tsubamoto

Research output: Contribution to journalArticle

18 Citations (Scopus)

Abstract

We have developed an extremely small integrated microencoder whose sides are less than 1mmlong. It is 1/100 the size of conventional encoders. This microencoder consists of a laser diode, monolithic photodiodes, and fluorinated polyimide waveguides with total internal reflection mirrors. The instrument can measure the relative displacement between a grating scale and the encoder with a resolution of the order of 0.01 mm; it can also determine the direction in which the scale is moving. By using the two beams that were emitted from the two etched mirrors of the laser diode, by monolithic integration of the waveguide and photodiodes, and by fabrication of a step at the edge of the waveguide, we were able to eliminate conventional bulky optical components such as the beam splitter, the quarter-wavelength plate, bulky mirrors, and bulky photodetectors.

Original languageEnglish
Pages (from-to)6866-6873
Number of pages8
JournalApplied Optics
Volume38
Issue number33
DOIs
Publication statusPublished - Nov 20 1999

Fingerprint

coders
Waveguides
mirrors
Photodiodes
waveguides
photodiodes
Semiconductor lasers
semiconductor lasers
beam splitters
Photodetectors
polyimides
Polyimides
photometers
gratings
Fabrication
Wavelength
fabrication
wavelengths

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

Cite this

Sawada, R., Higurashi, E., Ito, T., Ohguchi, O., & Tsubamoto, M. (1999). Monolithic-integrated microlaser encoder. Applied Optics, 38(33), 6866-6873. https://doi.org/10.1364/AO.38.006866

Monolithic-integrated microlaser encoder. / Sawada, Renshi; Higurashi, Eiji; Ito, Takahiro; Ohguchi, Osamu; Tsubamoto, Mieko.

In: Applied Optics, Vol. 38, No. 33, 20.11.1999, p. 6866-6873.

Research output: Contribution to journalArticle

Sawada, R, Higurashi, E, Ito, T, Ohguchi, O & Tsubamoto, M 1999, 'Monolithic-integrated microlaser encoder', Applied Optics, vol. 38, no. 33, pp. 6866-6873. https://doi.org/10.1364/AO.38.006866
Sawada R, Higurashi E, Ito T, Ohguchi O, Tsubamoto M. Monolithic-integrated microlaser encoder. Applied Optics. 1999 Nov 20;38(33):6866-6873. https://doi.org/10.1364/AO.38.006866
Sawada, Renshi ; Higurashi, Eiji ; Ito, Takahiro ; Ohguchi, Osamu ; Tsubamoto, Mieko. / Monolithic-integrated microlaser encoder. In: Applied Optics. 1999 ; Vol. 38, No. 33. pp. 6866-6873.
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