Abstract
We have developed an extremely small integrated microencoder whose sides are less than 1mmlong. It is 1/100 the size of conventional encoders. This microencoder consists of a laser diode, monolithic photodiodes, and fluorinated polyimide waveguides with total internal reflection mirrors. The instrument can measure the relative displacement between a grating scale and the encoder with a resolution of the order of 0.01 mm; it can also determine the direction in which the scale is moving. By using the two beams that were emitted from the two etched mirrors of the laser diode, by monolithic integration of the waveguide and photodiodes, and by fabrication of a step at the edge of the waveguide, we were able to eliminate conventional bulky optical components such as the beam splitter, the quarter-wavelength plate, bulky mirrors, and bulky photodetectors.
| Original language | English |
|---|---|
| Pages (from-to) | 6866-6873 |
| Number of pages | 8 |
| Journal | Applied Optics |
| Volume | 38 |
| Issue number | 33 |
| DOIs | |
| Publication status | Published - Nov 20 1999 |
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All Science Journal Classification (ASJC) codes
- Atomic and Molecular Physics, and Optics
- Engineering (miscellaneous)
- Electrical and Electronic Engineering
Cite this
Monolithic-integrated microlaser encoder. / Sawada, Renshi; Higurashi, Eiji; Ito, Takahiro; Ohguchi, Osamu; Tsubamoto, Mieko.
In: Applied Optics, Vol. 38, No. 33, 20.11.1999, p. 6866-6873.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Monolithic-integrated microlaser encoder
AU - Sawada, Renshi
AU - Higurashi, Eiji
AU - Ito, Takahiro
AU - Ohguchi, Osamu
AU - Tsubamoto, Mieko
PY - 1999/11/20
Y1 - 1999/11/20
N2 - We have developed an extremely small integrated microencoder whose sides are less than 1mmlong. It is 1/100 the size of conventional encoders. This microencoder consists of a laser diode, monolithic photodiodes, and fluorinated polyimide waveguides with total internal reflection mirrors. The instrument can measure the relative displacement between a grating scale and the encoder with a resolution of the order of 0.01 mm; it can also determine the direction in which the scale is moving. By using the two beams that were emitted from the two etched mirrors of the laser diode, by monolithic integration of the waveguide and photodiodes, and by fabrication of a step at the edge of the waveguide, we were able to eliminate conventional bulky optical components such as the beam splitter, the quarter-wavelength plate, bulky mirrors, and bulky photodetectors.
AB - We have developed an extremely small integrated microencoder whose sides are less than 1mmlong. It is 1/100 the size of conventional encoders. This microencoder consists of a laser diode, monolithic photodiodes, and fluorinated polyimide waveguides with total internal reflection mirrors. The instrument can measure the relative displacement between a grating scale and the encoder with a resolution of the order of 0.01 mm; it can also determine the direction in which the scale is moving. By using the two beams that were emitted from the two etched mirrors of the laser diode, by monolithic integration of the waveguide and photodiodes, and by fabrication of a step at the edge of the waveguide, we were able to eliminate conventional bulky optical components such as the beam splitter, the quarter-wavelength plate, bulky mirrors, and bulky photodetectors.
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U2 - 10.1364/AO.38.006866
DO - 10.1364/AO.38.006866
M3 - Article
VL - 38
SP - 6866
EP - 6873
JO - Applied Optics
JF - Applied Optics
SN - 1559-128X
IS - 33
ER -