Monolithically integrated long-wavelength high-speed waveguide p-i-n HEMT receiver

Y. Akahori, Y. Muramoto, Kazutoshi Kato, M. Ikeda, A. Kozen, Y. Itaya

Research output: Contribution to journalArticle

Abstract

The paper presents an evaluation of a high speed side-illuminated receiver OEIC. This receiver consists of a waveguide p-i-n photodiode (WGPD) and an In AlAs/InGaAs HEMT transimpedance amplifier. The monolithic integration was accomplished by C2H6/O2 RIE, together with passivation on the HEMT structure. The photoreceiver had a 3-dB bandwidth of 8.3 GHz and a transimpedance of 100 Ω. This technology will lead to a high performance photonic circuits integrated with high-speed electronic circuits to control and process light signals.

Original languageEnglish
Pages (from-to)49-50
Number of pages2
JournalUnknown Journal
Publication statusPublished - 1994
Externally publishedYes

Fingerprint

High electron mobility transistors
high electron mobility transistors
Waveguides
receivers
high speed
waveguides
wavelength
Integrated optoelectronics
Wavelength
Operational amplifiers
Reactive ion etching
Photodiodes
Passivation
wavelengths
Photonics
passivity
photodiodes
integrated circuits
Integrated circuits
amplifiers

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Atomic and Molecular Physics, and Optics

Cite this

Akahori, Y., Muramoto, Y., Kato, K., Ikeda, M., Kozen, A., & Itaya, Y. (1994). Monolithically integrated long-wavelength high-speed waveguide p-i-n HEMT receiver. Unknown Journal, 49-50.

Monolithically integrated long-wavelength high-speed waveguide p-i-n HEMT receiver. / Akahori, Y.; Muramoto, Y.; Kato, Kazutoshi; Ikeda, M.; Kozen, A.; Itaya, Y.

In: Unknown Journal, 1994, p. 49-50.

Research output: Contribution to journalArticle

Akahori, Y, Muramoto, Y, Kato, K, Ikeda, M, Kozen, A & Itaya, Y 1994, 'Monolithically integrated long-wavelength high-speed waveguide p-i-n HEMT receiver', Unknown Journal, pp. 49-50.
Akahori, Y. ; Muramoto, Y. ; Kato, Kazutoshi ; Ikeda, M. ; Kozen, A. ; Itaya, Y. / Monolithically integrated long-wavelength high-speed waveguide p-i-n HEMT receiver. In: Unknown Journal. 1994 ; pp. 49-50.
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