Abstract
This paper describes the fabrication of a microelectromechanical-system (MEMS) mirror array for a wavelength-selective switch (WSS). The MEMS mirror array, in which a lot of closely spaced adjacent mirrors are electrostatically operated, consists of a MEMS mirrors and a mirror-drive electrodes. In order to reduce electrical interference, comb-shaped ground walls with a high aspect ratio of about 20 are monolithically integrated with the MEMS mirror chip. Further, U-shaped gold electroplating walls are formed in the mirror-drive electrode chip. With these walls, each MEMS mirror successfully operates with low electrical interference.
| Original language | English |
|---|---|
| Pages (from-to) | 897-901 |
| Number of pages | 5 |
| Journal | Precision Engineering |
| Volume | 37 |
| Issue number | 4 |
| DOIs | |
| Publication status | Published - Oct 1 2013 |
| Externally published | Yes |
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All Science Journal Classification (ASJC) codes
- Engineering(all)
Cite this
Monolithically integrated MEMS mirror array with low electrical interference in wavelength-selective switches. / Sakata, Tomomi; Sassa, Fumihiro; Usui, Mitsuo; Kodate, Junichi; Ishii, Hiromu; Machida, Katsuyuki; Jin, Yoshito.
In: Precision Engineering, Vol. 37, No. 4, 01.10.2013, p. 897-901.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Monolithically integrated MEMS mirror array with low electrical interference in wavelength-selective switches
AU - Sakata, Tomomi
AU - Sassa, Fumihiro
AU - Usui, Mitsuo
AU - Kodate, Junichi
AU - Ishii, Hiromu
AU - Machida, Katsuyuki
AU - Jin, Yoshito
PY - 2013/10/1
Y1 - 2013/10/1
N2 - This paper describes the fabrication of a microelectromechanical-system (MEMS) mirror array for a wavelength-selective switch (WSS). The MEMS mirror array, in which a lot of closely spaced adjacent mirrors are electrostatically operated, consists of a MEMS mirrors and a mirror-drive electrodes. In order to reduce electrical interference, comb-shaped ground walls with a high aspect ratio of about 20 are monolithically integrated with the MEMS mirror chip. Further, U-shaped gold electroplating walls are formed in the mirror-drive electrode chip. With these walls, each MEMS mirror successfully operates with low electrical interference.
AB - This paper describes the fabrication of a microelectromechanical-system (MEMS) mirror array for a wavelength-selective switch (WSS). The MEMS mirror array, in which a lot of closely spaced adjacent mirrors are electrostatically operated, consists of a MEMS mirrors and a mirror-drive electrodes. In order to reduce electrical interference, comb-shaped ground walls with a high aspect ratio of about 20 are monolithically integrated with the MEMS mirror chip. Further, U-shaped gold electroplating walls are formed in the mirror-drive electrode chip. With these walls, each MEMS mirror successfully operates with low electrical interference.
UR - http://www.scopus.com/inward/record.url?scp=84881152661&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84881152661&partnerID=8YFLogxK
U2 - 10.1016/j.precisioneng.2013.05.008
DO - 10.1016/j.precisioneng.2013.05.008
M3 - Article
AN - SCOPUS:84881152661
VL - 37
SP - 897
EP - 901
JO - Precision Engineering
JF - Precision Engineering
SN - 0141-6359
IS - 4
ER -