Monolithically integrated MEMS mirror array with low electrical interference in wavelength-selective switches

Tomomi Sakata, Fumihiro Sassa, Mitsuo Usui, Junichi Kodate, Hiromu Ishii, Katsuyuki Machida, Yoshito Jin

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

This paper describes the fabrication of a microelectromechanical-system (MEMS) mirror array for a wavelength-selective switch (WSS). The MEMS mirror array, in which a lot of closely spaced adjacent mirrors are electrostatically operated, consists of a MEMS mirrors and a mirror-drive electrodes. In order to reduce electrical interference, comb-shaped ground walls with a high aspect ratio of about 20 are monolithically integrated with the MEMS mirror chip. Further, U-shaped gold electroplating walls are formed in the mirror-drive electrode chip. With these walls, each MEMS mirror successfully operates with low electrical interference.

Original languageEnglish
Pages (from-to)897-901
Number of pages5
JournalPrecision Engineering
Volume37
Issue number4
DOIs
Publication statusPublished - Oct 1 2013
Externally publishedYes

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MEMS
Mirrors
Switches
Wavelength
Electrodes
Electroplating
Aspect ratio
Gold
Fabrication

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Monolithically integrated MEMS mirror array with low electrical interference in wavelength-selective switches. / Sakata, Tomomi; Sassa, Fumihiro; Usui, Mitsuo; Kodate, Junichi; Ishii, Hiromu; Machida, Katsuyuki; Jin, Yoshito.

In: Precision Engineering, Vol. 37, No. 4, 01.10.2013, p. 897-901.

Research output: Contribution to journalArticle

Sakata, Tomomi ; Sassa, Fumihiro ; Usui, Mitsuo ; Kodate, Junichi ; Ishii, Hiromu ; Machida, Katsuyuki ; Jin, Yoshito. / Monolithically integrated MEMS mirror array with low electrical interference in wavelength-selective switches. In: Precision Engineering. 2013 ; Vol. 37, No. 4. pp. 897-901.
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