TY - JOUR
T1 - Monolithically integrated MEMS mirror array with low electrical interference in wavelength-selective switches
AU - Sakata, Tomomi
AU - Sassa, Fumihiro
AU - Usui, Mitsuo
AU - Kodate, Junichi
AU - Ishii, Hiromu
AU - Machida, Katsuyuki
AU - Jin, Yoshito
PY - 2013/10/1
Y1 - 2013/10/1
N2 - This paper describes the fabrication of a microelectromechanical-system (MEMS) mirror array for a wavelength-selective switch (WSS). The MEMS mirror array, in which a lot of closely spaced adjacent mirrors are electrostatically operated, consists of a MEMS mirrors and a mirror-drive electrodes. In order to reduce electrical interference, comb-shaped ground walls with a high aspect ratio of about 20 are monolithically integrated with the MEMS mirror chip. Further, U-shaped gold electroplating walls are formed in the mirror-drive electrode chip. With these walls, each MEMS mirror successfully operates with low electrical interference.
AB - This paper describes the fabrication of a microelectromechanical-system (MEMS) mirror array for a wavelength-selective switch (WSS). The MEMS mirror array, in which a lot of closely spaced adjacent mirrors are electrostatically operated, consists of a MEMS mirrors and a mirror-drive electrodes. In order to reduce electrical interference, comb-shaped ground walls with a high aspect ratio of about 20 are monolithically integrated with the MEMS mirror chip. Further, U-shaped gold electroplating walls are formed in the mirror-drive electrode chip. With these walls, each MEMS mirror successfully operates with low electrical interference.
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U2 - 10.1016/j.precisioneng.2013.05.008
DO - 10.1016/j.precisioneng.2013.05.008
M3 - Article
AN - SCOPUS:84881152661
VL - 37
SP - 897
EP - 901
JO - Precision Engineering
JF - Precision Engineering
SN - 0141-6359
IS - 4
ER -