Monolithically integrated MEMS mirror array with low electrical interference in wavelength-selective switches

Tomomi Sakata, Fumihiro Sassa, Mitsuo Usui, Junichi Kodate, Hiromu Ishii, Katsuyuki Machida, Yoshito Jin

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

This paper describes the fabrication of a microelectromechanical-system (MEMS) mirror array for a wavelength-selective switch (WSS). The MEMS mirror array, in which a lot of closely spaced adjacent mirrors are electrostatically operated, consists of a MEMS mirrors and a mirror-drive electrodes. In order to reduce electrical interference, comb-shaped ground walls with a high aspect ratio of about 20 are monolithically integrated with the MEMS mirror chip. Further, U-shaped gold electroplating walls are formed in the mirror-drive electrode chip. With these walls, each MEMS mirror successfully operates with low electrical interference.

Original languageEnglish
Pages (from-to)897-901
Number of pages5
JournalPrecision Engineering
Volume37
Issue number4
DOIs
Publication statusPublished - Oct 1 2013
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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