Monolithically integrated MEMS mirror array with low electrical interference in wavelength-selective switches

Tomomi Sakata, Fumihiro Sassa, Mitsuo Usui, Junichi Kodate, Hiromu Ishii, Katsuyuki Machida, Yoshito Jin

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

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Material Science

Engineering