Monolithically integrated optical displacement sensor based on triangulation and optical beam deflection

Eiji Higurashi, Renshi Sawada, Takahiro Ito

Research output: Contribution to journalArticle

34 Citations (Scopus)

Abstract

A monolithically integrated optical displacement sensor based on triangulation and optical beam deflection is reported. This sensor is simple and consists of only a laser diode, a polyimide waveguide, and a split detector (a pair of photodiodes) upon a GaAs substrate. The resultant prototype device is extremely small (750 μm × 800 μm). Experiments have shown that this sensor can measure the displacement of a mirror with resolution of better than 4 nm. Additionally, we have experimentally demonstrated both axial and lateral displacement measurements when we used a cylindrical micromirror (diameter, 125 mm) as a movable external object.

Original languageEnglish
Pages (from-to)1746-1751
Number of pages6
JournalApplied Optics
Volume38
Issue number9
DOIs
Publication statusPublished - Mar 20 1999
Externally publishedYes

Fingerprint

triangulation
Triangulation
deflection
sensors
Sensors
Displacement measurement
displacement measurement
Photodiodes
polyimides
Polyimides
photodiodes
Semiconductor lasers
Mirrors
Waveguides
semiconductor lasers
prototypes
mirrors
waveguides
Detectors
detectors

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics

Cite this

Monolithically integrated optical displacement sensor based on triangulation and optical beam deflection. / Higurashi, Eiji; Sawada, Renshi; Ito, Takahiro.

In: Applied Optics, Vol. 38, No. 9, 20.03.1999, p. 1746-1751.

Research output: Contribution to journalArticle

Higurashi, Eiji ; Sawada, Renshi ; Ito, Takahiro. / Monolithically integrated optical displacement sensor based on triangulation and optical beam deflection. In: Applied Optics. 1999 ; Vol. 38, No. 9. pp. 1746-1751.
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