Monolithically integrated optical displacement sensor based on triangulation and optical beam deflection

Eiji Higurashi, Renshi Sawada, Takahiro Ito

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Abstract

A monolithically integrated optical displacement sensor based on triangulation and optical beam deflection is reported. This sensor is simple and consists of only a laser diode, a polyimide waveguide, and a split detector (a pair of photodiodes) upon a GaAs substrate. The resultant prototype device is extremely small (750 μm × 800 μm). Experiments have shown that this sensor can measure the displacement of a mirror with resolution of better than 4 nm. Additionally, we have experimentally demonstrated both axial and lateral displacement measurements when we used a cylindrical micromirror (diameter, 125 mm) as a movable external object.

Original languageEnglish
Pages (from-to)1746-1751
Number of pages6
JournalApplied Optics
Volume38
Issue number9
DOIs
Publication statusPublished - Mar 20 1999

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All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

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