Morphology controlling of 〈111〉-3C-SiC films by HMDS flow rate in LCVD

Qingfang Xu; Rong Tu; Qingyun Sun; Meijun Yang; Qizhong Li; Song Zhang; Lianmeng Zhang; Takashi Goto; Hitoshi Ohmori; Ji Shi; Haiwen Li; Marina Kosinova; Basu Bikramjit

doi:10.1039/c8ra09509d

Morphology controlling of 〈111〉-3C-SiC films by HMDS flow rate in LCVD

Qingfang Xu, Rong Tu, Qingyun Sun, Meijun Yang, Qizhong Li, Song Zhang, Lianmeng Zhang, Takashi Goto, Hitoshi Ohmori, Ji Shi, Haiwen Li, Marina Kosinova, Basu Bikramjit

Platform of Inter/Transdisciplinary Energy Research (Q-PIT)

Research output: Contribution to journal › Article

Abstract

Morphology of 〈111〉-oriented 3C-SiC films was transformed from mosaic to whisker to cauliflower-like with the increased flow rate (f) of hexametyldisilane (HMDS) in the process of laser chemical vapor deposition (LCVD). The SiC whiskers were naturally sharp hexagonal pyramids with average height of 250 nm and an aspect ratio in the range of 5 to 10, with a density of 1.3 × 10 ⁸ mm ^-2 . The influence mechanism of f on the surface morphology, as well as the growth mechanism of SiC whiskers, was discussed.

Original language	English
Pages (from-to)	2426-2430
Number of pages	5
Journal	RSC Advances
Volume	9
Issue number	5
DOIs	https://doi.org/10.1039/c8ra09509d
Publication status	Published - Jan 1 2019

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All Science Journal Classification (ASJC) codes

Chemistry(all)
Chemical Engineering(all)

Cite this

Xu, Q., Tu, R., Sun, Q., Yang, M., Li, Q., Zhang, S., ... Bikramjit, B. (2019). Morphology controlling of 〈111〉-3C-SiC films by HMDS flow rate in LCVD. RSC Advances, 9(5), 2426-2430. https://doi.org/10.1039/c8ra09509d

Morphology controlling of 〈111〉-3C-SiC films by HMDS flow rate in LCVD. / Xu, Qingfang; Tu, Rong; Sun, Qingyun; Yang, Meijun; Li, Qizhong; Zhang, Song; Zhang, Lianmeng; Goto, Takashi; Ohmori, Hitoshi; Shi, Ji; Li, Haiwen; Kosinova, Marina; Bikramjit, Basu.

In: RSC Advances, Vol. 9, No. 5, 01.01.2019, p. 2426-2430.

Research output: Contribution to journal › Article

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AU - Goto, Takashi

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10.1039/c8ra09509d