Morphology Evolution of ZnO Thin Films Deposited by Nitrogen Mediated Crystallization Method

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We study the surface morphology of ZnO thin films deposited by nitrogen mediated crystallization method utilizing atomic force microscopy as a function of nitrogen flow rates. Initially, the surface morphology of ZnO thin film deposited without nitrogen exhibits a bumpy surface with spiky grains where the skewness and kurtosis values were found to be 0.48 and 4.80, respectively. By addition of small amount of nitrogen, the skewness and kurtosis values of the films significantly decrease associated with a flatter topography. Further increase in nitrogen flow rate to 16 sccm has roughened the surface shown mainly by the increase in kurtosis value to be 3.30. These results indicate that the addition of small amount of nitrogen during deposition process has enhanced the adatoms migration on the surface resulting in a superior film with a larger grain size. Two-dimensional power spectral density analysis reveals that all the films have self-affine fractal geometry with total fractal values in the range of 2.14 to above 3.00.

Original languageEnglish
Article number02031
JournalMATEC Web of Conferences
Publication statusPublished - Mar 30 2018
Event2nd International Joint Conference on Advanced Engineering and Technology, IJCAET 2017 and International Symposium on Advanced Mechanical and Power Engineering, ISAMPE 2017 - Bali, Indonesia
Duration: Aug 24 2017Aug 26 2017


All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Materials Science(all)
  • Engineering(all)

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