Abstract
We study the surface morphology of ZnO thin films deposited by nitrogen mediated crystallization method utilizing atomic force microscopy as a function of nitrogen flow rates. Initially, the surface morphology of ZnO thin film deposited without nitrogen exhibits a bumpy surface with spiky grains where the skewness and kurtosis values were found to be 0.48 and 4.80, respectively. By addition of small amount of nitrogen, the skewness and kurtosis values of the films significantly decrease associated with a flatter topography. Further increase in nitrogen flow rate to 16 sccm has roughened the surface shown mainly by the increase in kurtosis value to be 3.30. These results indicate that the addition of small amount of nitrogen during deposition process has enhanced the adatoms migration on the surface resulting in a superior film with a larger grain size. Two-dimensional power spectral density analysis reveals that all the films have self-affine fractal geometry with total fractal values in the range of 2.14 to above 3.00.
| Original language | English |
|---|---|
| Article number | 02031 |
| Journal | MATEC Web of Conferences |
| Volume | 159 |
| DOIs | |
| Publication status | Published - Mar 30 2018 |
| Event | 2nd International Joint Conference on Advanced Engineering and Technology, IJCAET 2017 and International Symposium on Advanced Mechanical and Power Engineering, ISAMPE 2017 - Bali, Indonesia Duration: Aug 24 2017 → Aug 26 2017 |
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All Science Journal Classification (ASJC) codes
- Chemistry(all)
- Materials Science(all)
- Engineering(all)
Cite this
Morphology Evolution of ZnO Thin Films Deposited by Nitrogen Mediated Crystallization Method. / Suhariadi, Iping; Shiratani, Masaharu; Itagaki, Naho.
In: MATEC Web of Conferences, Vol. 159, 02031, 30.03.2018.Research output: Contribution to journal › Conference article
}
TY - JOUR
T1 - Morphology Evolution of ZnO Thin Films Deposited by Nitrogen Mediated Crystallization Method
AU - Suhariadi, Iping
AU - Shiratani, Masaharu
AU - Itagaki, Naho
PY - 2018/3/30
Y1 - 2018/3/30
N2 - We study the surface morphology of ZnO thin films deposited by nitrogen mediated crystallization method utilizing atomic force microscopy as a function of nitrogen flow rates. Initially, the surface morphology of ZnO thin film deposited without nitrogen exhibits a bumpy surface with spiky grains where the skewness and kurtosis values were found to be 0.48 and 4.80, respectively. By addition of small amount of nitrogen, the skewness and kurtosis values of the films significantly decrease associated with a flatter topography. Further increase in nitrogen flow rate to 16 sccm has roughened the surface shown mainly by the increase in kurtosis value to be 3.30. These results indicate that the addition of small amount of nitrogen during deposition process has enhanced the adatoms migration on the surface resulting in a superior film with a larger grain size. Two-dimensional power spectral density analysis reveals that all the films have self-affine fractal geometry with total fractal values in the range of 2.14 to above 3.00.
AB - We study the surface morphology of ZnO thin films deposited by nitrogen mediated crystallization method utilizing atomic force microscopy as a function of nitrogen flow rates. Initially, the surface morphology of ZnO thin film deposited without nitrogen exhibits a bumpy surface with spiky grains where the skewness and kurtosis values were found to be 0.48 and 4.80, respectively. By addition of small amount of nitrogen, the skewness and kurtosis values of the films significantly decrease associated with a flatter topography. Further increase in nitrogen flow rate to 16 sccm has roughened the surface shown mainly by the increase in kurtosis value to be 3.30. These results indicate that the addition of small amount of nitrogen during deposition process has enhanced the adatoms migration on the surface resulting in a superior film with a larger grain size. Two-dimensional power spectral density analysis reveals that all the films have self-affine fractal geometry with total fractal values in the range of 2.14 to above 3.00.
UR - http://www.scopus.com/inward/record.url?scp=85045284576&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85045284576&partnerID=8YFLogxK
U2 - 10.1051/matecconf/201815902031
DO - 10.1051/matecconf/201815902031
M3 - Conference article
AN - SCOPUS:85045284576
VL - 159
JO - MATEC Web of Conferences
JF - MATEC Web of Conferences
SN - 2261-236X
M1 - 02031
ER -