TY - JOUR
T1 - Morphology Evolution of ZnO Thin Films Deposited by Nitrogen Mediated Crystallization Method
AU - Suhariadi, Iping
AU - Shiratani, Masaharu
AU - Itagaki, Naho
N1 - Funding Information:
The authors gratefully acknowledge the financial support of Ministry of Research, Technology and Higher Education of the Republic of Indonesia through Tim Pascasarjana research grant (contract number: N . 873/U 7.21/PP/ 17)0 .
Publisher Copyright:
© The Authors, published by EDP Sciences, 2018.
PY - 2018/3/30
Y1 - 2018/3/30
N2 - We study the surface morphology of ZnO thin films deposited by nitrogen mediated crystallization method utilizing atomic force microscopy as a function of nitrogen flow rates. Initially, the surface morphology of ZnO thin film deposited without nitrogen exhibits a bumpy surface with spiky grains where the skewness and kurtosis values were found to be 0.48 and 4.80, respectively. By addition of small amount of nitrogen, the skewness and kurtosis values of the films significantly decrease associated with a flatter topography. Further increase in nitrogen flow rate to 16 sccm has roughened the surface shown mainly by the increase in kurtosis value to be 3.30. These results indicate that the addition of small amount of nitrogen during deposition process has enhanced the adatoms migration on the surface resulting in a superior film with a larger grain size. Two-dimensional power spectral density analysis reveals that all the films have self-affine fractal geometry with total fractal values in the range of 2.14 to above 3.00.
AB - We study the surface morphology of ZnO thin films deposited by nitrogen mediated crystallization method utilizing atomic force microscopy as a function of nitrogen flow rates. Initially, the surface morphology of ZnO thin film deposited without nitrogen exhibits a bumpy surface with spiky grains where the skewness and kurtosis values were found to be 0.48 and 4.80, respectively. By addition of small amount of nitrogen, the skewness and kurtosis values of the films significantly decrease associated with a flatter topography. Further increase in nitrogen flow rate to 16 sccm has roughened the surface shown mainly by the increase in kurtosis value to be 3.30. These results indicate that the addition of small amount of nitrogen during deposition process has enhanced the adatoms migration on the surface resulting in a superior film with a larger grain size. Two-dimensional power spectral density analysis reveals that all the films have self-affine fractal geometry with total fractal values in the range of 2.14 to above 3.00.
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U2 - 10.1051/matecconf/201815902031
DO - 10.1051/matecconf/201815902031
M3 - Conference article
AN - SCOPUS:85045284576
VL - 159
JO - MATEC Web of Conferences
JF - MATEC Web of Conferences
SN - 2261-236X
M1 - 02031
T2 - 2nd International Joint Conference on Advanced Engineering and Technology, IJCAET 2017 and International Symposium on Advanced Mechanical and Power Engineering, ISAMPE 2017
Y2 - 24 August 2017 through 26 August 2017
ER -