Abstract
Fabricating nanopatterns on polyimide (PI) films directly by nanoimprint lithography (NIL) is difficult owing to the high glass transition temperature (T g). In this study, a nanopatterned PI film was successfully obtained by nanoimprinting poly(amic acid) (PAA) film and curing it afterward. Differential scanning calorimetry, thermogravimetry and dynamic mechanical analysis were carried out to study the state of thermal molecular motion in PAA thick films that have the same content of residual solvent as the PAA thin films used in NIL. The thermal and dynamic mechanical behaviors of PI thick films were studied for comparison. An appropriate nanoimprinting process was proposed based on an understanding of the thermal and dynamic mechanical properties of PAA and PI films. Atomic force microscopy showed that the line pattern was transferred without distortion from the PAA film to the PI film, even though a larger shrinkage took place during the hard baking.
| Original language | English |
|---|---|
| Pages (from-to) | 1036-1041 |
| Number of pages | 6 |
| Journal | Polymer Journal |
| Volume | 44 |
| Issue number | 10 |
| DOIs | |
| Publication status | Published - Oct 1 2012 |
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All Science Journal Classification (ASJC) codes
- Polymers and Plastics
- Materials Chemistry
Cite this
Morphology of nanoimprinted polyimide films fabricated via a controlled thermal history. / Siqing, Sudu; Wu, Hui; Takahara, Atsushi.
In: Polymer Journal, Vol. 44, No. 10, 01.10.2012, p. 1036-1041.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Morphology of nanoimprinted polyimide films fabricated via a controlled thermal history
AU - Siqing, Sudu
AU - Wu, Hui
AU - Takahara, Atsushi
PY - 2012/10/1
Y1 - 2012/10/1
N2 - Fabricating nanopatterns on polyimide (PI) films directly by nanoimprint lithography (NIL) is difficult owing to the high glass transition temperature (T g). In this study, a nanopatterned PI film was successfully obtained by nanoimprinting poly(amic acid) (PAA) film and curing it afterward. Differential scanning calorimetry, thermogravimetry and dynamic mechanical analysis were carried out to study the state of thermal molecular motion in PAA thick films that have the same content of residual solvent as the PAA thin films used in NIL. The thermal and dynamic mechanical behaviors of PI thick films were studied for comparison. An appropriate nanoimprinting process was proposed based on an understanding of the thermal and dynamic mechanical properties of PAA and PI films. Atomic force microscopy showed that the line pattern was transferred without distortion from the PAA film to the PI film, even though a larger shrinkage took place during the hard baking.
AB - Fabricating nanopatterns on polyimide (PI) films directly by nanoimprint lithography (NIL) is difficult owing to the high glass transition temperature (T g). In this study, a nanopatterned PI film was successfully obtained by nanoimprinting poly(amic acid) (PAA) film and curing it afterward. Differential scanning calorimetry, thermogravimetry and dynamic mechanical analysis were carried out to study the state of thermal molecular motion in PAA thick films that have the same content of residual solvent as the PAA thin films used in NIL. The thermal and dynamic mechanical behaviors of PI thick films were studied for comparison. An appropriate nanoimprinting process was proposed based on an understanding of the thermal and dynamic mechanical properties of PAA and PI films. Atomic force microscopy showed that the line pattern was transferred without distortion from the PAA film to the PI film, even though a larger shrinkage took place during the hard baking.
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U2 - 10.1038/pj.2012.53
DO - 10.1038/pj.2012.53
M3 - Article
VL - 44
SP - 1036
EP - 1041
JO - Polymer Journal
JF - Polymer Journal
SN - 0032-3896
IS - 10
ER -