TY - JOUR
T1 - Multiplate microwave launcher for producing high-density electron cyclotron resonance plasmas
AU - Tanaka, Masayoshi
AU - Nagao, Keisuke
AU - Shoyama, Hiroaki
AU - Sugimoto, Masaya
AU - Kawai, Yoshinobu
PY - 1994/9
Y1 - 1994/9
N2 - A multiplate microwave launcher is developed to produce high-density electron cyclotron resonance plasmas. An electron cyclotron wave is successfully excited in the plasma, and the plasma production performance of the new launcher is comparable to that without shielding plates. This launcher allows high-power operations, and a density of 0.9 × 1013 cm-3 is obtained with a 2.45 GHz microwave at 5 kW input.
AB - A multiplate microwave launcher is developed to produce high-density electron cyclotron resonance plasmas. An electron cyclotron wave is successfully excited in the plasma, and the plasma production performance of the new launcher is comparable to that without shielding plates. This launcher allows high-power operations, and a density of 0.9 × 1013 cm-3 is obtained with a 2.45 GHz microwave at 5 kW input.
UR - http://www.scopus.com/inward/record.url?scp=0028511948&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0028511948&partnerID=8YFLogxK
U2 - 10.1143/JJAP.33.5028
DO - 10.1143/JJAP.33.5028
M3 - Article
AN - SCOPUS:0028511948
SN - 0021-4922
VL - 33
SP - 5028
EP - 5031
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
IS - 9 R
ER -