Multiplate microwave launcher for producing high-density electron cyclotron resonance plasmas

Masayoshi Tanaka, Keisuke Nagao, Hiroaki Shoyama, Masaya Sugimoto, Yoshinobu Kawai

    Research output: Contribution to journalArticlepeer-review

    3 Citations (Scopus)

    Abstract

    A multiplate microwave launcher is developed to produce high-density electron cyclotron resonance plasmas. An electron cyclotron wave is successfully excited in the plasma, and the plasma production performance of the new launcher is comparable to that without shielding plates. This launcher allows high-power operations, and a density of 0.9 × 1013 cm-3 is obtained with a 2.45 GHz microwave at 5 kW input.

    Original languageEnglish
    Pages (from-to)5028-5031
    Number of pages4
    JournalJapanese journal of applied physics
    Volume33
    Issue number9 R
    DOIs
    Publication statusPublished - Sep 1994

    All Science Journal Classification (ASJC) codes

    • Engineering(all)
    • Physics and Astronomy(all)

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