Multiplate microwave launcher for producing high-density electron cyclotron resonance plasmas

Masayoshi Tanaka, Keisuke Nagao, Hiroaki Shoyama, Masaya Sugimoto, Yoshinobu Kawai

    Research output: Contribution to journalArticle

    3 Citations (Scopus)

    Abstract

    A multiplate microwave launcher is developed to produce high-density electron cyclotron resonance plasmas. An electron cyclotron wave is successfully excited in the plasma, and the plasma production performance of the new launcher is comparable to that without shielding plates. This launcher allows high-power operations, and a density of 0.9 × 1013 cm-3 is obtained with a 2.45 GHz microwave at 5 kW input.

    Original languageEnglish
    Pages (from-to)5028-5031
    Number of pages4
    JournalJapanese Journal of Applied Physics
    Volume33
    Issue number9 R
    DOIs
    Publication statusPublished - Sep 1994

    Fingerprint

    Electron cyclotron resonance
    launchers
    electron cyclotron resonance
    Microwaves
    Plasmas
    microwaves
    Plasma sources
    Cyclotrons
    Shielding
    cyclotrons
    shielding
    Electrons
    electrons

    All Science Journal Classification (ASJC) codes

    • Engineering(all)
    • Physics and Astronomy(all)

    Cite this

    Multiplate microwave launcher for producing high-density electron cyclotron resonance plasmas. / Tanaka, Masayoshi; Nagao, Keisuke; Shoyama, Hiroaki; Sugimoto, Masaya; Kawai, Yoshinobu.

    In: Japanese Journal of Applied Physics, Vol. 33, No. 9 R, 09.1994, p. 5028-5031.

    Research output: Contribution to journalArticle

    Tanaka, Masayoshi ; Nagao, Keisuke ; Shoyama, Hiroaki ; Sugimoto, Masaya ; Kawai, Yoshinobu. / Multiplate microwave launcher for producing high-density electron cyclotron resonance plasmas. In: Japanese Journal of Applied Physics. 1994 ; Vol. 33, No. 9 R. pp. 5028-5031.
    @article{54a326c5d344427d8f066d750988c925,
    title = "Multiplate microwave launcher for producing high-density electron cyclotron resonance plasmas",
    abstract = "A multiplate microwave launcher is developed to produce high-density electron cyclotron resonance plasmas. An electron cyclotron wave is successfully excited in the plasma, and the plasma production performance of the new launcher is comparable to that without shielding plates. This launcher allows high-power operations, and a density of 0.9 × 1013 cm-3 is obtained with a 2.45 GHz microwave at 5 kW input.",
    author = "Masayoshi Tanaka and Keisuke Nagao and Hiroaki Shoyama and Masaya Sugimoto and Yoshinobu Kawai",
    year = "1994",
    month = "9",
    doi = "10.1143/JJAP.33.5028",
    language = "English",
    volume = "33",
    pages = "5028--5031",
    journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",
    issn = "0021-4922",
    publisher = "Institute of Physics",
    number = "9 R",

    }

    TY - JOUR

    T1 - Multiplate microwave launcher for producing high-density electron cyclotron resonance plasmas

    AU - Tanaka, Masayoshi

    AU - Nagao, Keisuke

    AU - Shoyama, Hiroaki

    AU - Sugimoto, Masaya

    AU - Kawai, Yoshinobu

    PY - 1994/9

    Y1 - 1994/9

    N2 - A multiplate microwave launcher is developed to produce high-density electron cyclotron resonance plasmas. An electron cyclotron wave is successfully excited in the plasma, and the plasma production performance of the new launcher is comparable to that without shielding plates. This launcher allows high-power operations, and a density of 0.9 × 1013 cm-3 is obtained with a 2.45 GHz microwave at 5 kW input.

    AB - A multiplate microwave launcher is developed to produce high-density electron cyclotron resonance plasmas. An electron cyclotron wave is successfully excited in the plasma, and the plasma production performance of the new launcher is comparable to that without shielding plates. This launcher allows high-power operations, and a density of 0.9 × 1013 cm-3 is obtained with a 2.45 GHz microwave at 5 kW input.

    UR - http://www.scopus.com/inward/record.url?scp=0028511948&partnerID=8YFLogxK

    UR - http://www.scopus.com/inward/citedby.url?scp=0028511948&partnerID=8YFLogxK

    U2 - 10.1143/JJAP.33.5028

    DO - 10.1143/JJAP.33.5028

    M3 - Article

    AN - SCOPUS:0028511948

    VL - 33

    SP - 5028

    EP - 5031

    JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

    JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

    SN - 0021-4922

    IS - 9 R

    ER -