n- and p-type doping of 4H-SiC by wet-chemical laser processing

Koji Nishi, Akihiro Ikeda, Hiroshi Ikenoue, Tanemasa Asano

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)645-648
JournalMaterials Science Forum
Volume778-780
Publication statusPublished - Feb 2014

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