Nano-artifact metrics based on random collapse of resist

Tsutomu Matsumoto, Morihisa Hoga, Yasuyuki Ohyagi, Mikio Ishikawa, Makoto Naruse, Kenta Hanaki, Ryosuke Suzuki, Daiki Sekiguchi, Naoya Tate, Motoichi Ohtsu

Research output: Contribution to journalArticlepeer-review

20 Citations (Scopus)

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Engineering & Materials Science