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Nano-artifact metrics based on random collapse of resist
Tsutomu Matsumoto, Morihisa Hoga, Yasuyuki Ohyagi, Mikio Ishikawa, Makoto Naruse, Kenta Hanaki, Ryosuke Suzuki, Daiki Sekiguchi, Naoya Tate, Motoichi Ohtsu
Research output: Contribution to journal › Article › peer-review
20
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(Scopus)