Nano-dimensional measurement using optically trapped probe enhanced by interferometric scale

Masaki Michihata, Daisuke Nakai, Terutake Hayashi, Yasuhiro Takaya

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

We propose a new dimensional measurement technique that is capable of measuring the bottom surface of a stepwise shape. The measurement system is composed of a length scale and a sensor probe to read the scale. The probe is trapped and controlled three-dimensionally by laser trapping technique. The scale is arisen by optical interference, which is extended straight to the measured surface from the probe. Firstly measurement principle is theoretically explained. Remarkable feature of this technique is feasibility to access the area as narrow as 15 μm. Vertical resolution of this measurement technique is experimentally estimated as 10 nm. The measurable range of the inclination angle of surface is less than 15°. In terms of the measurement accuracy, it is evaluated around 100 nm.

Original languageEnglish
Title of host publication19th IMEKO World Congress 2009
Pages2163-2168
Number of pages6
Publication statusPublished - Dec 1 2009
Externally publishedYes
Event19th IMEKO World Congress 2009 - Lisbon, Portugal
Duration: Sep 6 2009Sep 11 2009

Publication series

Name19th IMEKO World Congress 2009
Volume4

Other

Other19th IMEKO World Congress 2009
CountryPortugal
CityLisbon
Period9/6/099/11/09

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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  • Cite this

    Michihata, M., Nakai, D., Hayashi, T., & Takaya, Y. (2009). Nano-dimensional measurement using optically trapped probe enhanced by interferometric scale. In 19th IMEKO World Congress 2009 (pp. 2163-2168). (19th IMEKO World Congress 2009; Vol. 4).