Nano-dimensional measurement using optically trapped probe enhanced by interferometric scale

Masaki Michihata, Daisuke Nakai, Terutake Hayashi, Yasuhiro Takaya

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

We propose a new dimensional measurement technique that is capable of measuring the bottom surface of a stepwise shape. The measurement system is composed of a length scale and a sensor probe to read the scale. The probe is trapped and controlled three-dimensionally by laser trapping technique. The scale is arisen by optical interference, which is extended straight to the measured surface from the probe. Firstly measurement principle is theoretically explained. Remarkable feature of this technique is feasibility to access the area as narrow as 15 μm. Vertical resolution of this measurement technique is experimentally estimated as 10 nm. The measurable range of the inclination angle of surface is less than 15°. In terms of the measurement accuracy, it is evaluated around 100 nm.

Original languageEnglish
Title of host publication19th IMEKO World Congress 2009
Pages2163-2168
Number of pages6
Publication statusPublished - Dec 1 2009
Event19th IMEKO World Congress 2009 - Lisbon, Portugal
Duration: Sep 6 2009Sep 11 2009

Publication series

Name19th IMEKO World Congress 2009
Volume4

Other

Other19th IMEKO World Congress 2009
CountryPortugal
CityLisbon
Period9/6/099/11/09

Fingerprint

Light interference
Lasers
Sensors

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

Michihata, M., Nakai, D., Hayashi, T., & Takaya, Y. (2009). Nano-dimensional measurement using optically trapped probe enhanced by interferometric scale. In 19th IMEKO World Congress 2009 (pp. 2163-2168). (19th IMEKO World Congress 2009; Vol. 4).

Nano-dimensional measurement using optically trapped probe enhanced by interferometric scale. / Michihata, Masaki; Nakai, Daisuke; Hayashi, Terutake; Takaya, Yasuhiro.

19th IMEKO World Congress 2009. 2009. p. 2163-2168 (19th IMEKO World Congress 2009; Vol. 4).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Michihata, M, Nakai, D, Hayashi, T & Takaya, Y 2009, Nano-dimensional measurement using optically trapped probe enhanced by interferometric scale. in 19th IMEKO World Congress 2009. 19th IMEKO World Congress 2009, vol. 4, pp. 2163-2168, 19th IMEKO World Congress 2009, Lisbon, Portugal, 9/6/09.
Michihata M, Nakai D, Hayashi T, Takaya Y. Nano-dimensional measurement using optically trapped probe enhanced by interferometric scale. In 19th IMEKO World Congress 2009. 2009. p. 2163-2168. (19th IMEKO World Congress 2009).
Michihata, Masaki ; Nakai, Daisuke ; Hayashi, Terutake ; Takaya, Yasuhiro. / Nano-dimensional measurement using optically trapped probe enhanced by interferometric scale. 19th IMEKO World Congress 2009. 2009. pp. 2163-2168 (19th IMEKO World Congress 2009).
@inproceedings{7f7b32f9ca3343fc863284363ce580c4,
title = "Nano-dimensional measurement using optically trapped probe enhanced by interferometric scale",
abstract = "We propose a new dimensional measurement technique that is capable of measuring the bottom surface of a stepwise shape. The measurement system is composed of a length scale and a sensor probe to read the scale. The probe is trapped and controlled three-dimensionally by laser trapping technique. The scale is arisen by optical interference, which is extended straight to the measured surface from the probe. Firstly measurement principle is theoretically explained. Remarkable feature of this technique is feasibility to access the area as narrow as 15 μm. Vertical resolution of this measurement technique is experimentally estimated as 10 nm. The measurable range of the inclination angle of surface is less than 15°. In terms of the measurement accuracy, it is evaluated around 100 nm.",
author = "Masaki Michihata and Daisuke Nakai and Terutake Hayashi and Yasuhiro Takaya",
year = "2009",
month = "12",
day = "1",
language = "English",
isbn = "9781615675937",
series = "19th IMEKO World Congress 2009",
pages = "2163--2168",
booktitle = "19th IMEKO World Congress 2009",

}

TY - GEN

T1 - Nano-dimensional measurement using optically trapped probe enhanced by interferometric scale

AU - Michihata, Masaki

AU - Nakai, Daisuke

AU - Hayashi, Terutake

AU - Takaya, Yasuhiro

PY - 2009/12/1

Y1 - 2009/12/1

N2 - We propose a new dimensional measurement technique that is capable of measuring the bottom surface of a stepwise shape. The measurement system is composed of a length scale and a sensor probe to read the scale. The probe is trapped and controlled three-dimensionally by laser trapping technique. The scale is arisen by optical interference, which is extended straight to the measured surface from the probe. Firstly measurement principle is theoretically explained. Remarkable feature of this technique is feasibility to access the area as narrow as 15 μm. Vertical resolution of this measurement technique is experimentally estimated as 10 nm. The measurable range of the inclination angle of surface is less than 15°. In terms of the measurement accuracy, it is evaluated around 100 nm.

AB - We propose a new dimensional measurement technique that is capable of measuring the bottom surface of a stepwise shape. The measurement system is composed of a length scale and a sensor probe to read the scale. The probe is trapped and controlled three-dimensionally by laser trapping technique. The scale is arisen by optical interference, which is extended straight to the measured surface from the probe. Firstly measurement principle is theoretically explained. Remarkable feature of this technique is feasibility to access the area as narrow as 15 μm. Vertical resolution of this measurement technique is experimentally estimated as 10 nm. The measurable range of the inclination angle of surface is less than 15°. In terms of the measurement accuracy, it is evaluated around 100 nm.

UR - http://www.scopus.com/inward/record.url?scp=84871547612&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84871547612&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:84871547612

SN - 9781615675937

T3 - 19th IMEKO World Congress 2009

SP - 2163

EP - 2168

BT - 19th IMEKO World Congress 2009

ER -