Nano-factories in plasma: Present status and outlook

Masaharu Shiratani, Kazunori Koga, Shinya Iwashita, Giichiro Uchida, Naho Itagaki, Kunihiro Kamataki

Research output: Contribution to journalArticlepeer-review

33 Citations (Scopus)


We propose the concept of 'nano-factory in plasma' which is a miniature version of a macroscopic conventional factory. A nano-factory in plasma produces nanoblocks and radicals (adhesives) in reactive plasmas, transports nanoblocks towards a substrate and arranges them on the substrate. We describe several key control methods for a nano-factory in plasma: size and structure control of nanoparticles, control of their agglomeration, transport and sticking, and then explain the combination of several types of control. Finally we point out remaining important issues in nano-factories in plasma.

Original languageEnglish
Article number174038
JournalJournal of Physics D: Applied Physics
Issue number17
Publication statusPublished - May 4 2011

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Acoustics and Ultrasonics
  • Surfaces, Coatings and Films


Dive into the research topics of 'Nano-factories in plasma: Present status and outlook'. Together they form a unique fingerprint.

Cite this