Nano-finishing using a micro-particle controlled by optical radiation force

Kenshiro Hida, Takashi Miyoshi, Yasuhiro Takaya, Terutake Hayashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationProceedings of the 20th Annual ASPE Meeting, ASPE 2005
Publication statusPublished - 2005
Externally publishedYes
Event20th Annual Meeting of the American Society for Precision Engineering, ASPE 2005 - Norfolk, VA, United States
Duration: Oct 9 2005Oct 14 2005

Publication series

NameProceedings of the 20th Annual ASPE Meeting, ASPE 2005

Other

Other20th Annual Meeting of the American Society for Precision Engineering, ASPE 2005
CountryUnited States
CityNorfolk, VA
Period10/9/0510/14/05

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering

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