Nano-finishing using a micro-particle controlled by optical radiation force

Kenshiro Hida, Takashi Miyoshi, Yasuhiro Takaya, Terutake Hayashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationProceedings of the 20th Annual ASPE Meeting, ASPE 2005
Publication statusPublished - 2005
Externally publishedYes
Event20th Annual Meeting of the American Society for Precision Engineering, ASPE 2005 - Norfolk, VA, United States
Duration: Oct 9 2005Oct 14 2005

Publication series

NameProceedings of the 20th Annual ASPE Meeting, ASPE 2005

Other

Other20th Annual Meeting of the American Society for Precision Engineering, ASPE 2005
Country/TerritoryUnited States
CityNorfolk, VA
Period10/9/0510/14/05

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering

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