Nano manufacturing of a small-tipped stylus for measurement of micro-machine elements with concave surfaces

Syuhei Kurokawa, S. Imamura

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The purpose of this research is to manufacture a new small-tipped stylus for measurement of micro machine elements with concave shapes. It is very difficult to measure surfaces of concave shapes because its overhanging part becomes the obstacle against measurement. We need to develop a small tipped stylus to be able to reach the position to be measured. In machining process, one of the photolithography technique is applied: the combination of the electron-beam exposure and the etching process of a silicon chip. In this paper, a preferable stylus shape is proposed and the trial manufacturing of the stylus has been performed with wet etching and dry deep reactive ion etching (DRIE). Several process conditions of etching and resultant shapes of manufactured styli are investigated and evaluated with SEM observation. The difficulty of achieving adequate etched features is shown especially due to the degree of under-etch phenomena.

Original languageEnglish
Title of host publicationProceedings of the 35th International MATADOR 2007 Conference
Pages7-10
Number of pages4
Publication statusPublished - 2007
Event35th International MATADOR 2007 Conference - Taipei, Taiwan, Province of China
Duration: Jul 1 2007Jul 1 2007

Other

Other35th International MATADOR 2007 Conference
CountryTaiwan, Province of China
CityTaipei
Period7/1/077/1/07

Fingerprint

Etching
Wet etching
Reactive ion etching
Photolithography
Electron beams
Machining
Silicon
Scanning electron microscopy

All Science Journal Classification (ASJC) codes

  • Mechanics of Materials

Cite this

Kurokawa, S., & Imamura, S. (2007). Nano manufacturing of a small-tipped stylus for measurement of micro-machine elements with concave surfaces. In Proceedings of the 35th International MATADOR 2007 Conference (pp. 7-10)

Nano manufacturing of a small-tipped stylus for measurement of micro-machine elements with concave surfaces. / Kurokawa, Syuhei; Imamura, S.

Proceedings of the 35th International MATADOR 2007 Conference. 2007. p. 7-10.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kurokawa, S & Imamura, S 2007, Nano manufacturing of a small-tipped stylus for measurement of micro-machine elements with concave surfaces. in Proceedings of the 35th International MATADOR 2007 Conference. pp. 7-10, 35th International MATADOR 2007 Conference, Taipei, Taiwan, Province of China, 7/1/07.
Kurokawa S, Imamura S. Nano manufacturing of a small-tipped stylus for measurement of micro-machine elements with concave surfaces. In Proceedings of the 35th International MATADOR 2007 Conference. 2007. p. 7-10
Kurokawa, Syuhei ; Imamura, S. / Nano manufacturing of a small-tipped stylus for measurement of micro-machine elements with concave surfaces. Proceedings of the 35th International MATADOR 2007 Conference. 2007. pp. 7-10
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