Nanocrystalline diamond films were grown in a hydrogen atmosphere by pulsed laser deposition (PLD). The transmission electron microscopy indicated the presence of non-oriented nanocrystalline diamond films, with crystallite diameters 10-20 nm, grown at an optimum hydrogen pressure of 4 Torr. A small amount of amorphous carbon was observed to have remained in the film. The typical deposition rate was 80 nm/min. The substrate temperature for the growth was 550 °C, which is lower by 150 °C than that of the conventional chemical vapor deposition. The deposited film had a smooth surface on the nanoscale.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Mechanical Engineering
- Materials Chemistry
- Electrical and Electronic Engineering