Nanocrystalline diamond film prepared by pulsed laser deposition in a hydrogen atmosphere

Takeshi Hara, Tsuyoshi Yoshitake, Tomohito Fukugawa, Ling yun Zhu, Masaru Itakura, Noriyuki Kuwano, Yoshitsugu Tomokiyo, Kunihito Nagayama

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

Nanocrystalline diamond films were grown in a hydrogen atmosphere by pulsed laser deposition (PLD). The transmission electron microscopy indicated the presence of non-oriented nanocrystalline diamond films, with crystallite diameters 10-20 nm, grown at an optimum hydrogen pressure of 4 Torr. A small amount of amorphous carbon was observed to have remained in the film. The typical deposition rate was 80 nm/min. The substrate temperature for the growth was 550 °C, which is lower by 150 °C than that of the conventional chemical vapor deposition. The deposited film had a smooth surface on the nanoscale.

Original languageEnglish
Pages (from-to)679-683
Number of pages5
JournalDiamond and Related Materials
Volume13
Issue number4-8
DOIs
Publication statusPublished - Apr 1 2004

Fingerprint

Diamond films
Pulsed laser deposition
diamond films
pulsed laser deposition
Hydrogen
atmospheres
Amorphous carbon
hydrogen
Deposition rates
Chemical vapor deposition
vapor deposition
Transmission electron microscopy
transmission electron microscopy
carbon
Substrates
Temperature
temperature

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

Cite this

Nanocrystalline diamond film prepared by pulsed laser deposition in a hydrogen atmosphere. / Hara, Takeshi; Yoshitake, Tsuyoshi; Fukugawa, Tomohito; Zhu, Ling yun; Itakura, Masaru; Kuwano, Noriyuki; Tomokiyo, Yoshitsugu; Nagayama, Kunihito.

In: Diamond and Related Materials, Vol. 13, No. 4-8, 01.04.2004, p. 679-683.

Research output: Contribution to journalArticle

Hara, Takeshi ; Yoshitake, Tsuyoshi ; Fukugawa, Tomohito ; Zhu, Ling yun ; Itakura, Masaru ; Kuwano, Noriyuki ; Tomokiyo, Yoshitsugu ; Nagayama, Kunihito. / Nanocrystalline diamond film prepared by pulsed laser deposition in a hydrogen atmosphere. In: Diamond and Related Materials. 2004 ; Vol. 13, No. 4-8. pp. 679-683.
@article{b9ead96e1c4d4166a976aeb4b6356447,
title = "Nanocrystalline diamond film prepared by pulsed laser deposition in a hydrogen atmosphere",
abstract = "Nanocrystalline diamond films were grown in a hydrogen atmosphere by pulsed laser deposition (PLD). The transmission electron microscopy indicated the presence of non-oriented nanocrystalline diamond films, with crystallite diameters 10-20 nm, grown at an optimum hydrogen pressure of 4 Torr. A small amount of amorphous carbon was observed to have remained in the film. The typical deposition rate was 80 nm/min. The substrate temperature for the growth was 550 °C, which is lower by 150 °C than that of the conventional chemical vapor deposition. The deposited film had a smooth surface on the nanoscale.",
author = "Takeshi Hara and Tsuyoshi Yoshitake and Tomohito Fukugawa and Zhu, {Ling yun} and Masaru Itakura and Noriyuki Kuwano and Yoshitsugu Tomokiyo and Kunihito Nagayama",
year = "2004",
month = "4",
day = "1",
doi = "10.1016/j.diamond.2003.10.055",
language = "English",
volume = "13",
pages = "679--683",
journal = "Diamond and Related Materials",
issn = "0925-9635",
publisher = "Elsevier BV",
number = "4-8",

}

TY - JOUR

T1 - Nanocrystalline diamond film prepared by pulsed laser deposition in a hydrogen atmosphere

AU - Hara, Takeshi

AU - Yoshitake, Tsuyoshi

AU - Fukugawa, Tomohito

AU - Zhu, Ling yun

AU - Itakura, Masaru

AU - Kuwano, Noriyuki

AU - Tomokiyo, Yoshitsugu

AU - Nagayama, Kunihito

PY - 2004/4/1

Y1 - 2004/4/1

N2 - Nanocrystalline diamond films were grown in a hydrogen atmosphere by pulsed laser deposition (PLD). The transmission electron microscopy indicated the presence of non-oriented nanocrystalline diamond films, with crystallite diameters 10-20 nm, grown at an optimum hydrogen pressure of 4 Torr. A small amount of amorphous carbon was observed to have remained in the film. The typical deposition rate was 80 nm/min. The substrate temperature for the growth was 550 °C, which is lower by 150 °C than that of the conventional chemical vapor deposition. The deposited film had a smooth surface on the nanoscale.

AB - Nanocrystalline diamond films were grown in a hydrogen atmosphere by pulsed laser deposition (PLD). The transmission electron microscopy indicated the presence of non-oriented nanocrystalline diamond films, with crystallite diameters 10-20 nm, grown at an optimum hydrogen pressure of 4 Torr. A small amount of amorphous carbon was observed to have remained in the film. The typical deposition rate was 80 nm/min. The substrate temperature for the growth was 550 °C, which is lower by 150 °C than that of the conventional chemical vapor deposition. The deposited film had a smooth surface on the nanoscale.

UR - http://www.scopus.com/inward/record.url?scp=2442462193&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=2442462193&partnerID=8YFLogxK

U2 - 10.1016/j.diamond.2003.10.055

DO - 10.1016/j.diamond.2003.10.055

M3 - Article

AN - SCOPUS:2442462193

VL - 13

SP - 679

EP - 683

JO - Diamond and Related Materials

JF - Diamond and Related Materials

SN - 0925-9635

IS - 4-8

ER -