Nanoimprint technology for application to photonic devices

Masashi Nakao, Shiyoshi Yokoyama, Hideki Masuda

Research output: Contribution to journalConference articlepeer-review

Abstract

We have developed nanoimprint technology to fabricate functional optical components. The future and usage of various molds for nanoimprint are described and their patterning examples are shown. Several applications of the nanoimprint technology are introduced; anti-reflection surface structure by using graded convex and concave patterns, extremely low threshold dye laser by 2-dimensional photonic crystals infiltrated with a gain medium, and various semiconductor nanostructures being used for functional optical devices. Nanoimprint is key technology to realize these components.

Original languageEnglish
Article number605001
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume6050
DOIs
Publication statusPublished - Dec 1 2005
Externally publishedYes
EventOptomechatronic Micro/Nano Devices and Components - Sappora, Japan
Duration: Dec 5 2005Dec 7 2005

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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