Abstract
We have developed nanoimprint technology to fabricate functional optical components. The future and usage of various molds for nanoimprint are described and their patterning examples are shown. Several applications of the nanoimprint technology are introduced; anti-reflection surface structure by using graded convex and concave patterns, extremely low threshold dye laser by 2-dimensional photonic crystals infiltrated with a gain medium, and various semiconductor nanostructures being used for functional optical devices. Nanoimprint is key technology to realize these components.
Original language | English |
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Article number | 605001 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 6050 |
DOIs | |
Publication status | Published - Dec 1 2005 |
Externally published | Yes |
Event | Optomechatronic Micro/Nano Devices and Components - Sappora, Japan Duration: Dec 5 2005 → Dec 7 2005 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering