Nanomanufacturing of radial grating patterns by nanoimprint with a silicon mould for rotational angle measurement of micro gears

Syuhei Kurokawa, Morihisa Hoga, Toshiro Doi

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Micro gear is one of interesting micro machine elements for micro mechanisms in the next generation. In order to measure the rotational motions of meshing micro gears, a grating disk of a micro rotary encoder should be developed. For measurement of rotational accuracy of micro gears, it is necessary to utilise a pair of micro rotary encoders whose diameters are smaller than the reference diameter of micro gears to be measured to avoid the interference between the encoder and the rotational shaft. The focus of this article is to develop and manufacture radial grating patterns for such grating disks of micro rotary encoders. The designed grating disk has a diameter less than 1 mm and the number of gratings is up to 10,000, whose inner half pitch is corresponding to about 50 nm. It was manufactured with nanoimprint technique with a silicon master mould which is developed by EB writer and lithography technique. The radial grating patterns were successfully achieved homogeneously. The accuracy of the pitch and the line width are investigated and height of line and space is measured by AFM. It is found that it is possible to realise grating disks of a micro rotary encoder.

Original languageEnglish
Pages (from-to)123-139
Number of pages17
JournalInternational Journal of Nanomanufacturing
Volume8
Issue number1-2
DOIs
Publication statusPublished - Jan 2012

Fingerprint

Angle measurement
Gears
Silicon
Linewidth
Lithography

All Science Journal Classification (ASJC) codes

  • Industrial and Manufacturing Engineering

Cite this

Nanomanufacturing of radial grating patterns by nanoimprint with a silicon mould for rotational angle measurement of micro gears. / Kurokawa, Syuhei; Hoga, Morihisa; Doi, Toshiro.

In: International Journal of Nanomanufacturing, Vol. 8, No. 1-2, 01.2012, p. 123-139.

Research output: Contribution to journalArticle

@article{dfe05bd5c02741cc9d9384c650754fcd,
title = "Nanomanufacturing of radial grating patterns by nanoimprint with a silicon mould for rotational angle measurement of micro gears",
abstract = "Micro gear is one of interesting micro machine elements for micro mechanisms in the next generation. In order to measure the rotational motions of meshing micro gears, a grating disk of a micro rotary encoder should be developed. For measurement of rotational accuracy of micro gears, it is necessary to utilise a pair of micro rotary encoders whose diameters are smaller than the reference diameter of micro gears to be measured to avoid the interference between the encoder and the rotational shaft. The focus of this article is to develop and manufacture radial grating patterns for such grating disks of micro rotary encoders. The designed grating disk has a diameter less than 1 mm and the number of gratings is up to 10,000, whose inner half pitch is corresponding to about 50 nm. It was manufactured with nanoimprint technique with a silicon master mould which is developed by EB writer and lithography technique. The radial grating patterns were successfully achieved homogeneously. The accuracy of the pitch and the line width are investigated and height of line and space is measured by AFM. It is found that it is possible to realise grating disks of a micro rotary encoder.",
author = "Syuhei Kurokawa and Morihisa Hoga and Toshiro Doi",
year = "2012",
month = "1",
doi = "10.1504/IJNM.2012.044660",
language = "English",
volume = "8",
pages = "123--139",
journal = "International Journal of Nanomanufacturing",
issn = "1746-9392",
publisher = "Inderscience Enterprises Ltd",
number = "1-2",

}

TY - JOUR

T1 - Nanomanufacturing of radial grating patterns by nanoimprint with a silicon mould for rotational angle measurement of micro gears

AU - Kurokawa, Syuhei

AU - Hoga, Morihisa

AU - Doi, Toshiro

PY - 2012/1

Y1 - 2012/1

N2 - Micro gear is one of interesting micro machine elements for micro mechanisms in the next generation. In order to measure the rotational motions of meshing micro gears, a grating disk of a micro rotary encoder should be developed. For measurement of rotational accuracy of micro gears, it is necessary to utilise a pair of micro rotary encoders whose diameters are smaller than the reference diameter of micro gears to be measured to avoid the interference between the encoder and the rotational shaft. The focus of this article is to develop and manufacture radial grating patterns for such grating disks of micro rotary encoders. The designed grating disk has a diameter less than 1 mm and the number of gratings is up to 10,000, whose inner half pitch is corresponding to about 50 nm. It was manufactured with nanoimprint technique with a silicon master mould which is developed by EB writer and lithography technique. The radial grating patterns were successfully achieved homogeneously. The accuracy of the pitch and the line width are investigated and height of line and space is measured by AFM. It is found that it is possible to realise grating disks of a micro rotary encoder.

AB - Micro gear is one of interesting micro machine elements for micro mechanisms in the next generation. In order to measure the rotational motions of meshing micro gears, a grating disk of a micro rotary encoder should be developed. For measurement of rotational accuracy of micro gears, it is necessary to utilise a pair of micro rotary encoders whose diameters are smaller than the reference diameter of micro gears to be measured to avoid the interference between the encoder and the rotational shaft. The focus of this article is to develop and manufacture radial grating patterns for such grating disks of micro rotary encoders. The designed grating disk has a diameter less than 1 mm and the number of gratings is up to 10,000, whose inner half pitch is corresponding to about 50 nm. It was manufactured with nanoimprint technique with a silicon master mould which is developed by EB writer and lithography technique. The radial grating patterns were successfully achieved homogeneously. The accuracy of the pitch and the line width are investigated and height of line and space is measured by AFM. It is found that it is possible to realise grating disks of a micro rotary encoder.

UR - http://www.scopus.com/inward/record.url?scp=84857203553&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84857203553&partnerID=8YFLogxK

U2 - 10.1504/IJNM.2012.044660

DO - 10.1504/IJNM.2012.044660

M3 - Article

AN - SCOPUS:84857203553

VL - 8

SP - 123

EP - 139

JO - International Journal of Nanomanufacturing

JF - International Journal of Nanomanufacturing

SN - 1746-9392

IS - 1-2

ER -