Nanometer-scale surface analysis by laser-ablation fluorescence spectroscopy

Yuji Oki, Mitsuo Maeda, Akira Hirano

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

This report demonstrates a very low absolute direction limit in Na atoms less than 1 fg with the LAA F spectroscopy. Applying this technique, a solid target of a strong LAA F signal for the ablation of 9 nm thickness is attained. It can be expected that the measurement of the density distribution of a specified element with a spatial resolution is less than 1 μm.

Original languageEnglish
Pages (from-to)330
Number of pages1
JournalUnknown Journal
Publication statusPublished - 1996

Fingerprint

fluorescence spectroscopy
Surface analysis
Fluorescence spectroscopy
Laser ablation
Ablation
ablation
spatial resolution
laser
spectroscopy
Spectroscopy
Atoms
distribution
analysis

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Industrial and Manufacturing Engineering

Cite this

Nanometer-scale surface analysis by laser-ablation fluorescence spectroscopy. / Oki, Yuji; Maeda, Mitsuo; Hirano, Akira.

In: Unknown Journal, 1996, p. 330.

Research output: Contribution to journalArticle

@article{f3bc046e62124cc696d9731325981418,
title = "Nanometer-scale surface analysis by laser-ablation fluorescence spectroscopy",
abstract = "This report demonstrates a very low absolute direction limit in Na atoms less than 1 fg with the LAA F spectroscopy. Applying this technique, a solid target of a strong LAA F signal for the ablation of 9 nm thickness is attained. It can be expected that the measurement of the density distribution of a specified element with a spatial resolution is less than 1 μm.",
author = "Yuji Oki and Mitsuo Maeda and Akira Hirano",
year = "1996",
language = "English",
pages = "330",
journal = "Quaternary International",
issn = "1040-6182",
publisher = "Elsevier Limited",

}

TY - JOUR

T1 - Nanometer-scale surface analysis by laser-ablation fluorescence spectroscopy

AU - Oki, Yuji

AU - Maeda, Mitsuo

AU - Hirano, Akira

PY - 1996

Y1 - 1996

N2 - This report demonstrates a very low absolute direction limit in Na atoms less than 1 fg with the LAA F spectroscopy. Applying this technique, a solid target of a strong LAA F signal for the ablation of 9 nm thickness is attained. It can be expected that the measurement of the density distribution of a specified element with a spatial resolution is less than 1 μm.

AB - This report demonstrates a very low absolute direction limit in Na atoms less than 1 fg with the LAA F spectroscopy. Applying this technique, a solid target of a strong LAA F signal for the ablation of 9 nm thickness is attained. It can be expected that the measurement of the density distribution of a specified element with a spatial resolution is less than 1 μm.

UR - http://www.scopus.com/inward/record.url?scp=0029698290&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0029698290&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0029698290

SP - 330

JO - Quaternary International

JF - Quaternary International

SN - 1040-6182

ER -