Nanometer-scale surface analysis by laser-ablation fluorescence spectroscopy

Yuji Oki, Mitsuo Maeda, Akira Hirano

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)


This report demonstrates a very low absolute direction limit in Na atoms less than 1 fg with the LAA F spectroscopy. Applying this technique, a solid target of a strong LAA F signal for the ablation of 9 nm thickness is attained. It can be expected that the measurement of the density distribution of a specified element with a spatial resolution is less than 1 μm.

Original languageEnglish
Pages (from-to)330
Number of pages1
JournalUnknown Journal
Publication statusPublished - 1996

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Industrial and Manufacturing Engineering


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