Nanometer-scale surface element analysis using laser ablation atomic fluorescence spectroscopy

Takashi Higotani, Min Kyu Kim, Takayuki Takao, Yuji Oki, Mitsuo Maeda

Research output: Contribution to conferencePaper

Abstract

Using the ultraviolet laser ablation, a very thin layer removal of a polymer and a glass was possible by single laser shot. Element analysis with nanometer-scale resolution was demonstrated for polymethyl methacrylate sample in combination with the laser-induced fluorescence spectroscopy. Nanometer-scale removal was also possible for silicon and metals by femtosecond laser ablation.

Original languageEnglish
Publication statusPublished - Dec 1 2001
Event4th Pacific Rim Conference on Lasers and Electro-Optics - Chiba, Japan
Duration: Jul 15 2001Jul 19 2001

Other

Other4th Pacific Rim Conference on Lasers and Electro-Optics
CountryJapan
CityChiba
Period7/15/017/19/01

Fingerprint

Atomic spectroscopy
Fluorescence spectroscopy
Laser ablation
laser ablation
Descaling
Ultraviolet lasers
fluorescence
Lasers
Polymethyl Methacrylate
Silicon
Ultrashort pulses
ultraviolet lasers
Polymethyl methacrylates
polymethyl methacrylate
laser induced fluorescence
spectroscopy
shot
Polymers
Metals
Glass

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

Higotani, T., Kim, M. K., Takao, T., Oki, Y., & Maeda, M. (2001). Nanometer-scale surface element analysis using laser ablation atomic fluorescence spectroscopy. Paper presented at 4th Pacific Rim Conference on Lasers and Electro-Optics, Chiba, Japan.

Nanometer-scale surface element analysis using laser ablation atomic fluorescence spectroscopy. / Higotani, Takashi; Kim, Min Kyu; Takao, Takayuki; Oki, Yuji; Maeda, Mitsuo.

2001. Paper presented at 4th Pacific Rim Conference on Lasers and Electro-Optics, Chiba, Japan.

Research output: Contribution to conferencePaper

Higotani, T, Kim, MK, Takao, T, Oki, Y & Maeda, M 2001, 'Nanometer-scale surface element analysis using laser ablation atomic fluorescence spectroscopy', Paper presented at 4th Pacific Rim Conference on Lasers and Electro-Optics, Chiba, Japan, 7/15/01 - 7/19/01.
Higotani T, Kim MK, Takao T, Oki Y, Maeda M. Nanometer-scale surface element analysis using laser ablation atomic fluorescence spectroscopy. 2001. Paper presented at 4th Pacific Rim Conference on Lasers and Electro-Optics, Chiba, Japan.
Higotani, Takashi ; Kim, Min Kyu ; Takao, Takayuki ; Oki, Yuji ; Maeda, Mitsuo. / Nanometer-scale surface element analysis using laser ablation atomic fluorescence spectroscopy. Paper presented at 4th Pacific Rim Conference on Lasers and Electro-Optics, Chiba, Japan.
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AU - Maeda, Mitsuo

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