Nanometer-scale surface element analysis using laser ablation atomic fluorescence spectroscopy

Takashi Higotani, Min Kyu Kim, Takayuki Takao, Yuji Oki, Mitsuo Maeda

Research output: Contribution to conferencePaper

Abstract

Using the ultraviolet laser ablation, a very thin layer removal of a polymer and a glass was possible by single laser shot. Element analysis with nanometer-scale resolution was demonstrated for polymethyl methacrylate sample in combination with the laser-induced fluorescence spectroscopy. Nanometer-scale removal was also possible for silicon and metals by femtosecond laser ablation.

Original languageEnglish
Publication statusPublished - Dec 1 2001
Event4th Pacific Rim Conference on Lasers and Electro-Optics - Chiba, Japan
Duration: Jul 15 2001Jul 19 2001

Other

Other4th Pacific Rim Conference on Lasers and Electro-Optics
CountryJapan
CityChiba
Period7/15/017/19/01

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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  • Cite this

    Higotani, T., Kim, M. K., Takao, T., Oki, Y., & Maeda, M. (2001). Nanometer-scale surface element analysis using laser ablation atomic fluorescence spectroscopy. Paper presented at 4th Pacific Rim Conference on Lasers and Electro-Optics, Chiba, Japan.