@inproceedings{61c91e038e5d4af6a0cb76a1094f8107,
title = "Nanophotonic polishing of substrate for application to hard-disk and optical-disk processing",
author = "Takashi Yatsui and Wataru Nomura and Motoichi Ohtsu",
year = "2011",
month = jan,
day = "1",
language = "English",
isbn = "9781557529152",
series = "Optics InfoBase Conference Papers",
publisher = "Optical Society of American (OSA)",
booktitle = "Joint International Symposium on Optical Memory and Optical Data Storage, ISOM_ODS 2011",
note = "Joint International Symposium on Optical Memory and Optical Data Storage, ISOM_ODS 2011 ; Conference date: 17-07-2011 Through 20-07-2011",
}