Nanopore formation on SOI(100) by CH3SiH3 pulse jet CVD:SiC growth temperature dependence

Yoshifumi Ikoma, Yuta Nishino, Shouhei Anan, Toshiaki Abe, Hirofumi Sakita

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

    Fingerprint

    Dive into the research topics of 'Nanopore formation on SOI(100) by CH3SiH3 pulse jet CVD:SiC growth temperature dependence'. Together they form a unique fingerprint.

    Chemistry

    Material Science