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Dive into the research topics of 'Nanopore formation on SOI(100) by CH3SiH3 pulse jet CVD:SiC growth temperature dependence'. Together they form a unique fingerprint.- Sort by
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Yoshifumi Ikoma, Yuta Nishino, Shouhei Anan, Toshiaki Abe, Hirofumi Sakita
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution