Nanoscale and femtogram trace element analysis using soft laser ablation fluorescence spectroscopy

Yuji Oki, Takayuki Takao, Takashi Higotani, Daisuke Nakamura, Mitsuo Maeda

Research output: Contribution to journalConference articlepeer-review

Abstract

A solid-state surface analysis of trace element was demonstrated with nanometer depth resolution and femtogram detection sensitivity. An LIF spectroscopy was combined with an excimer laser ablation, and the depth resolution of 3.6nm was obtained.

Original languageEnglish
Pages (from-to)1854-1855
Number of pages2
JournalOSA Trends in Optics and Photonics Series
Volume88
Publication statusPublished - Jan 1 2003
EventConference on Lasers and Electro-Optics (CLEO); Postconference Digest - Baltimore, MD, United States
Duration: Jun 1 2003Jun 6 2003

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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