This paper describes comparison between atomic force microscope (AFM) measurements with a Si tip and a 200-nm-diameter Ni nanowire tip. A produced nanowire AFM probe successfully produced topographic images showing profiles convoluted with a tip radius of 100-200 nm. Bending stiffness of metal nanowires realizes a smaller lateral spring constant than Si and Si3N 4 tips. Inelastic deformations of nanowires occurred under excessive loads. The maximum end deflections for nanowires to break the elasticity, which beam mechanics indicates, were applicable to our observed results.