Nanostructure fabrication on an Al surface by chemical and electrochemical multiprocess and nanoscale molecular patterning on the nanostructured Al surface

Y. Watanabe, H. Kato, S. Takemura, S. Kusama, G. Iimura, T. Sugiyama, T. Hiramatsu, N. Nanba, O. Nishikawa, M. Taniguchi

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

A chemical and electrochemical multistage process was conducted on an Al surface in order to create new types of nanostructures on the Al surface. The multistage processing was a combination of fabrication processes of linked crater and highly oriented line types of nanostructures on an Al surface. At the first stage, a highly oriented line structure was fabricated by treatment with acetone and subsequent anodization. The line separation was estimated approximately 30-40 nm. At the second stage, the nanostructure formed from the first stage was modified by treating with the chemical agent Semiclean and ultrasonic agitation. Dynamic force microscopy measurements showed that a tilted-step structure, or sawtoothed structure, was created from the highly oriented line structure. In the sawtooth structure, nanoscale sawtooth-shaped structures, which were composed of tilted steps, were created over 5 μ m2 areas and were aligned along the original highly oriented lines. Furthermore, molecular and polymer patterns were created on this unique nanostructure using copper phthalocyanine (CuPc) and polyaniline. The CuPc molecules were deposited on the nanostructure from toluene droplets containing CuPc while aniline monomers were polymerized on the sawtooth structure. In the case of CuPc deposition, a nanoscale pattern was created along the original sawtooth structure. In the case of polyaniline deposition resulted in a lot of grain-shaped polyaniline structures were grown on the tilted steps while a large tree-shaped polyaniline fiber was found crossing the tilted steps.

Original languageEnglish
Pages (from-to)874-881
Number of pages8
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume27
Issue number2
DOIs
Publication statusPublished - Apr 20 2009
Externally publishedYes

Fingerprint

nanofabrication
Nanostructures
Polyaniline
Fabrication
ultrasonic agitation
agitation
aniline
craters
acetone
toluene
Aniline
Acetone
monomers
Toluene
microscopy
Microscopic examination
copper
Monomers
fabrication
Ultrasonics

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

Nanostructure fabrication on an Al surface by chemical and electrochemical multiprocess and nanoscale molecular patterning on the nanostructured Al surface. / Watanabe, Y.; Kato, H.; Takemura, S.; Kusama, S.; Iimura, G.; Sugiyama, T.; Hiramatsu, T.; Nanba, N.; Nishikawa, O.; Taniguchi, M.

In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 27, No. 2, 20.04.2009, p. 874-881.

Research output: Contribution to journalArticle

Watanabe, Y. ; Kato, H. ; Takemura, S. ; Kusama, S. ; Iimura, G. ; Sugiyama, T. ; Hiramatsu, T. ; Nanba, N. ; Nishikawa, O. ; Taniguchi, M. / Nanostructure fabrication on an Al surface by chemical and electrochemical multiprocess and nanoscale molecular patterning on the nanostructured Al surface. In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 2009 ; Vol. 27, No. 2. pp. 874-881.
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