Nature of preferred orientation of yba2cu3ox thin films

Masashi Mukaida, Shintaro Mlyazawa

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62 Citations (Scopus)


To clarify a preferential orientation of YBa2Cu30x thin films, the growth parameters of a- and c-axis oriented thin films are investigated. YBa2Cu30x thin films are grown on different lattice-mismatching substrates, such as Nd: YAIO3 (001), LaAlOs (100), NdGaC>3 (110), PrGaOs (001), SrTiC>3 (100) and MgO (100) by pulsed laser deposition (PLD) to determine the a- and c-axis preferential orientation phase diagrams. These a- and c-axis preferential orientations are controlled by the lattice constant of the substrate, the substrate temperature during deposition, the oxygen pressure in the growth chamber, and the laser power. The existence of a c-axis oriented YBa2Cu30x layer between the substrate and a-axis oriented YBa2Cu30x thin films is explained.

Original languageEnglish
Pages (from-to)4521-4528
Number of pages8
JournalJapanese Journal of Applied Physics
Issue number10 R
Publication statusPublished - Oct 1993
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)


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