New method to obtain (001) surface-oriented polycrystalline silicon films by intensity-modulated excimer laser annealing: Molecular dynamics study

Norie Matsubara, Tomohiko Ogata, Takanori Mitani, Shinji Munetoh, Teruaki Motooka

    Research output: Contribution to journal › Article › peer-review

    3 Citations (Scopus)

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    Physics

    Biochemistry, Genetics and Molecular Biology