New Methodology for Evaluating Minority Carrier Lifetime for Process Assessment

K. Kakushima, T. Hoshii, M. Watanabe, N. Shizyo, K. Furukawa, T. Saraya, T. Takakura, K. Itou, M. Fukui, S. Suzuki, K. Takeuchi, I. Muneta, H. Wakabayashi, Y. Numasawa, A. Ogura, S. Nishizawa, K. Tsutsui, T. Hiramoto, H. Ohashi, H. Iwai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

A new methodology to evaluate the process temperature dependence of the minority carrier lifetime has been developed. A TEG layout with p+-stripes on an n-Si substrate was designed. When all the p+n junctions are made forward, the minority carrier diffusion current flows one dimensionally into the substrate. On the other hand, for making only the one center p+n junction forward, the current spreads laterally and flows cylindrically into the substrate. By the difference in the flow path of the minority carrier diffusion, we can successfully extract the minority carrier lifetime. We applied this methodology to the evaluation of the minority carrier lifetime depending on process temperatures and confirmed the lifetime degradation for high temperature process.

Original languageEnglish
Title of host publication2018 IEEE Symposium on VLSI Circuits, VLSI Circuits 2018
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages105-106
Number of pages2
ISBN (Electronic)9781538667002
DOIs
Publication statusPublished - Oct 22 2018
Event32nd IEEE Symposium on VLSI Circuits, VLSI Circuits 2018 - Honolulu, United States
Duration: Jun 18 2018Jun 22 2018

Publication series

NameIEEE Symposium on VLSI Circuits, Digest of Technical Papers
Volume2018-June

Other

Other32nd IEEE Symposium on VLSI Circuits, VLSI Circuits 2018
CountryUnited States
CityHonolulu
Period6/18/186/22/18

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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  • Cite this

    Kakushima, K., Hoshii, T., Watanabe, M., Shizyo, N., Furukawa, K., Saraya, T., Takakura, T., Itou, K., Fukui, M., Suzuki, S., Takeuchi, K., Muneta, I., Wakabayashi, H., Numasawa, Y., Ogura, A., Nishizawa, S., Tsutsui, K., Hiramoto, T., Ohashi, H., & Iwai, H. (2018). New Methodology for Evaluating Minority Carrier Lifetime for Process Assessment. In 2018 IEEE Symposium on VLSI Circuits, VLSI Circuits 2018 (pp. 105-106). [8502399] (IEEE Symposium on VLSI Circuits, Digest of Technical Papers; Vol. 2018-June). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/VLSIC.2018.8502399