TY - JOUR
T1 - New microwave launcher for producing ecr plasmas without window contamination i. Excitation of electron cyclotron wave
AU - Tanaka, Masayoshi
AU - Tamaoki, Makoto
AU - Higashi, Seiichiro
AU - Matsuoka, Morito
AU - Komori, Akio
AU - Kawai, Yoshinobu
PY - 1993/4
Y1 - 1993/4
N2 - A new microwave launcher with a reflector plate is experimentally examined. The reflector plate covers the microwave window and prevents particles from depositing onto the window surface. Two types of launchers are tested in terms of achieved density, excited wave mode and microwave reflection. It is found that the Type-II launcher is capable of exciting an electron cyclotron wave and produces dense plasmas of 1012 cm-3 density.
AB - A new microwave launcher with a reflector plate is experimentally examined. The reflector plate covers the microwave window and prevents particles from depositing onto the window surface. Two types of launchers are tested in terms of achieved density, excited wave mode and microwave reflection. It is found that the Type-II launcher is capable of exciting an electron cyclotron wave and produces dense plasmas of 1012 cm-3 density.
UR - http://www.scopus.com/inward/record.url?scp=0027578303&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0027578303&partnerID=8YFLogxK
U2 - 10.1143/JJAP.32.1818
DO - 10.1143/JJAP.32.1818
M3 - Article
AN - SCOPUS:0027578303
VL - 32
SP - 1818
EP - 1821
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 4 R
ER -