New microwave launcher for producing ecr plasmas without window contamination i. Excitation of electron cyclotron wave

Masayoshi Tanaka, Makoto Tamaoki, Seiichiro Higashi, Morito Matsuoka, Akio Komori, Yoshinobu Kawai

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    4 Citations (Scopus)


    A new microwave launcher with a reflector plate is experimentally examined. The reflector plate covers the microwave window and prevents particles from depositing onto the window surface. Two types of launchers are tested in terms of achieved density, excited wave mode and microwave reflection. It is found that the Type-II launcher is capable of exciting an electron cyclotron wave and produces dense plasmas of 1012 cm-3 density.

    Original languageEnglish
    Pages (from-to)1818-1821
    Number of pages4
    JournalJapanese Journal of Applied Physics
    Issue number4 R
    Publication statusPublished - Apr 1993


    All Science Journal Classification (ASJC) codes

    • Engineering(all)
    • Physics and Astronomy(all)

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