New microwave launcher for producing ecr plasmas without window contamination i. Excitation of electron cyclotron wave

Masayoshi Tanaka; Makoto Tamaoki; Seiichiro Higashi; Morito Matsuoka; Akio Komori; Yoshinobu Kawai

doi:10.1143/JJAP.32.1818

New microwave launcher for producing ecr plasmas without window contamination i. Excitation of electron cyclotron wave

Masayoshi Tanaka, Makoto Tamaoki, Seiichiro Higashi, Morito Matsuoka, Akio Komori, Yoshinobu Kawai

Research output: Contribution to journal › Article

4 Citations (Scopus)

Abstract

A new microwave launcher with a reflector plate is experimentally examined. The reflector plate covers the microwave window and prevents particles from depositing onto the window surface. Two types of launchers are tested in terms of achieved density, excited wave mode and microwave reflection. It is found that the Type-II launcher is capable of exciting an electron cyclotron wave and produces dense plasmas of 10¹² cm^-3 density.

Original language	English
Pages (from-to)	1818-1821
Number of pages	4
Journal	Japanese Journal of Applied Physics
Volume	32
Issue number	4 R
DOIs	https://doi.org/10.1143/JJAP.32.1818
Publication status	Published - Apr 1993

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All Science Journal Classification (ASJC) codes

Engineering(all)
Physics and Astronomy(all)

Cite this

Tanaka, M., Tamaoki, M., Higashi, S., Matsuoka, M., Komori, A., & Kawai, Y. (1993). New microwave launcher for producing ecr plasmas without window contamination i. Excitation of electron cyclotron wave. Japanese Journal of Applied Physics, 32(4 R), 1818-1821. https://doi.org/10.1143/JJAP.32.1818

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AU - Komori, Akio

AU - Kawai, Yoshinobu

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Access to Document

10.1143/JJAP.32.1818