New microwave launcher for producing ecr plasmas without window contamination i. Excitation of electron cyclotron wave

Masayoshi Tanaka; Makoto Tamaoki; Seiichiro Higashi; Morito Matsuoka; Akio Komori; Yoshinobu Kawai

doi:10.1143/JJAP.32.1818

New microwave launcher for producing ecr plasmas without window contamination i. Excitation of electron cyclotron wave

Masayoshi Tanaka, Makoto Tamaoki, Seiichiro Higashi, Morito Matsuoka, Akio Komori, Yoshinobu Kawai

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

A new microwave launcher with a reflector plate is experimentally examined. The reflector plate covers the microwave window and prevents particles from depositing onto the window surface. Two types of launchers are tested in terms of achieved density, excited wave mode and microwave reflection. It is found that the Type-II launcher is capable of exciting an electron cyclotron wave and produces dense plasmas of 10¹² cm^-3 density.

Original language	English
Pages (from-to)	1818-1821
Number of pages	4
Journal	Japanese Journal of Applied Physics
Volume	32
Issue number	4 R
DOIs	https://doi.org/10.1143/JJAP.32.1818
Publication status	Published - Apr 1993

All Science Journal Classification (ASJC) codes

Engineering(all)
Physics and Astronomy(all)

Access to Document

10.1143/JJAP.32.1818

Fingerprint Dive into the research topics of 'New microwave launcher for producing ecr plasmas without window contamination i. Excitation of electron cyclotron wave'. Together they form a unique fingerprint.

Cite this

New microwave launcher for producing ecr plasmas without window contamination i. Excitation of electron cyclotron wave. / Tanaka, Masayoshi; Tamaoki, Makoto; Higashi, Seiichiro; Matsuoka, Morito; Komori, Akio; Kawai, Yoshinobu.

In: Japanese Journal of Applied Physics, Vol. 32, No. 4 R, 04.1993, p. 1818-1821.

Research output: Contribution to journal › Article › peer-review

@article{8c496641cb334da294ff3d7cbc3a46de,

title = "New microwave launcher for producing ecr plasmas without window contamination i. Excitation of electron cyclotron wave",

abstract = "A new microwave launcher with a reflector plate is experimentally examined. The reflector plate covers the microwave window and prevents particles from depositing onto the window surface. Two types of launchers are tested in terms of achieved density, excited wave mode and microwave reflection. It is found that the Type-II launcher is capable of exciting an electron cyclotron wave and produces dense plasmas of 1012 cm-3 density.",

author = "Masayoshi Tanaka and Makoto Tamaoki and Seiichiro Higashi and Morito Matsuoka and Akio Komori and Yoshinobu Kawai",

year = "1993",

month = apr,

doi = "10.1143/JJAP.32.1818",

language = "English",

volume = "32",

pages = "1818--1821",

journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",

issn = "0021-4922",

publisher = "Institute of Physics",

number = "4 R",

}

TY - JOUR

T1 - New microwave launcher for producing ecr plasmas without window contamination i. Excitation of electron cyclotron wave

AU - Tanaka, Masayoshi

AU - Tamaoki, Makoto

AU - Higashi, Seiichiro

AU - Matsuoka, Morito

AU - Komori, Akio

AU - Kawai, Yoshinobu

PY - 1993/4

Y1 - 1993/4

N2 - A new microwave launcher with a reflector plate is experimentally examined. The reflector plate covers the microwave window and prevents particles from depositing onto the window surface. Two types of launchers are tested in terms of achieved density, excited wave mode and microwave reflection. It is found that the Type-II launcher is capable of exciting an electron cyclotron wave and produces dense plasmas of 1012 cm-3 density.

AB - A new microwave launcher with a reflector plate is experimentally examined. The reflector plate covers the microwave window and prevents particles from depositing onto the window surface. Two types of launchers are tested in terms of achieved density, excited wave mode and microwave reflection. It is found that the Type-II launcher is capable of exciting an electron cyclotron wave and produces dense plasmas of 1012 cm-3 density.

UR - http://www.scopus.com/inward/record.url?scp=0027578303&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0027578303&partnerID=8YFLogxK

U2 - 10.1143/JJAP.32.1818

DO - 10.1143/JJAP.32.1818

M3 - Article

AN - SCOPUS:0027578303

VL - 32

SP - 1818

EP - 1821

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

IS - 4 R

ER -