New perspectives of gas sensor technology

Noboru Yamazoe, Kengo Shimanoe

Research output: Contribution to journalArticle

233 Citations (Scopus)

Abstract

Two recent topics important for advancing gas sensor technology are introduced. Semiconductor gas sensors have been developed so far on empirical bases but now a fundamental theory has been made available for further developments. The theory reveals the roles of physical properties of semiconductors and chemical properties of gases in the receptor function. MEMS techniques have been applied to fabrication of micro-platforms for use in gas sensors. The micro-platforms appear to provide gas sensors with new innovative function.

Original languageEnglish
Pages (from-to)100-107
Number of pages8
JournalSensors and Actuators, B: Chemical
Volume138
Issue number1
DOIs
Publication statusPublished - Apr 24 2009

Fingerprint

Chemical sensors
sensors
gases
Semiconductor materials
platforms
Chemical properties
MEMS
Physical properties
chemical properties
Gases
microelectromechanical systems
Fabrication
physical properties
fabrication

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

Cite this

New perspectives of gas sensor technology. / Yamazoe, Noboru; Shimanoe, Kengo.

In: Sensors and Actuators, B: Chemical, Vol. 138, No. 1, 24.04.2009, p. 100-107.

Research output: Contribution to journalArticle

Yamazoe, Noboru ; Shimanoe, Kengo. / New perspectives of gas sensor technology. In: Sensors and Actuators, B: Chemical. 2009 ; Vol. 138, No. 1. pp. 100-107.
@article{1c0b7a2362a545bd903ba0f1d5545e7b,
title = "New perspectives of gas sensor technology",
abstract = "Two recent topics important for advancing gas sensor technology are introduced. Semiconductor gas sensors have been developed so far on empirical bases but now a fundamental theory has been made available for further developments. The theory reveals the roles of physical properties of semiconductors and chemical properties of gases in the receptor function. MEMS techniques have been applied to fabrication of micro-platforms for use in gas sensors. The micro-platforms appear to provide gas sensors with new innovative function.",
author = "Noboru Yamazoe and Kengo Shimanoe",
year = "2009",
month = "4",
day = "24",
doi = "10.1016/j.snb.2009.01.023",
language = "English",
volume = "138",
pages = "100--107",
journal = "Sensors and Actuators, B: Chemical",
issn = "0925-4005",
publisher = "Elsevier",
number = "1",

}

TY - JOUR

T1 - New perspectives of gas sensor technology

AU - Yamazoe, Noboru

AU - Shimanoe, Kengo

PY - 2009/4/24

Y1 - 2009/4/24

N2 - Two recent topics important for advancing gas sensor technology are introduced. Semiconductor gas sensors have been developed so far on empirical bases but now a fundamental theory has been made available for further developments. The theory reveals the roles of physical properties of semiconductors and chemical properties of gases in the receptor function. MEMS techniques have been applied to fabrication of micro-platforms for use in gas sensors. The micro-platforms appear to provide gas sensors with new innovative function.

AB - Two recent topics important for advancing gas sensor technology are introduced. Semiconductor gas sensors have been developed so far on empirical bases but now a fundamental theory has been made available for further developments. The theory reveals the roles of physical properties of semiconductors and chemical properties of gases in the receptor function. MEMS techniques have been applied to fabrication of micro-platforms for use in gas sensors. The micro-platforms appear to provide gas sensors with new innovative function.

UR - http://www.scopus.com/inward/record.url?scp=63749111316&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=63749111316&partnerID=8YFLogxK

U2 - 10.1016/j.snb.2009.01.023

DO - 10.1016/j.snb.2009.01.023

M3 - Article

AN - SCOPUS:63749111316

VL - 138

SP - 100

EP - 107

JO - Sensors and Actuators, B: Chemical

JF - Sensors and Actuators, B: Chemical

SN - 0925-4005

IS - 1

ER -