New perspectives of gas sensor technology

Noboru Yamazoe, Kengo Shimanoe

Research output: Contribution to journalArticlepeer-review

266 Citations (Scopus)

Abstract

Two recent topics important for advancing gas sensor technology are introduced. Semiconductor gas sensors have been developed so far on empirical bases but now a fundamental theory has been made available for further developments. The theory reveals the roles of physical properties of semiconductors and chemical properties of gases in the receptor function. MEMS techniques have been applied to fabrication of micro-platforms for use in gas sensors. The micro-platforms appear to provide gas sensors with new innovative function.

Original languageEnglish
Pages (from-to)100-107
Number of pages8
JournalSensors and Actuators, B: Chemical
Volume138
Issue number1
DOIs
Publication statusPublished - Apr 24 2009

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

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