New structural design of micro-thermoelectric sensor for wide range hydrogen detection

Maiko Nishibori, Woosuck Shin, Lionel F. Houlet, Kazuki Tajima, Toshio Itoh, Noriya Izu, Norimitsu Murayama, Ichiro Matsubara

Research output: Contribution to journalArticle

37 Citations (Scopus)

Abstract

Thermoelectric hydrogen sensor (THS) is a promising candidate for a hydrogen leak alarm system because of its unique, reliable working principle and its performance has been improved by fabricating it as a micro-device. In this study, we have investigated the performance of a micro-THS with new design of 4 × 4 mm2 chip. The integration of a thermoelectric thin film of B-dope SiGe and a ceramic catalyst of Pt 40 mass% loaded alumina into a micro hot-plate on a thin membrane, has improved its performance. We have demonstrated that the micro-THS detected the wide range of H2 concentration in air from low as 0.5 ppm to high as 5 vol%.

Original languageEnglish
Pages (from-to)853-856
Number of pages4
JournalJournal of the Ceramic Society of Japan
Volume114
Issue number1334
DOIs
Publication statusPublished - Jan 1 2006
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Ceramics and Composites
  • Chemistry(all)
  • Condensed Matter Physics
  • Materials Chemistry

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    Nishibori, M., Shin, W., Houlet, L. F., Tajima, K., Itoh, T., Izu, N., Murayama, N., & Matsubara, I. (2006). New structural design of micro-thermoelectric sensor for wide range hydrogen detection. Journal of the Ceramic Society of Japan, 114(1334), 853-856. https://doi.org/10.2109/jcersj.114.853