TY - JOUR
T1 - New structural design of micro-thermoelectric sensor for wide range hydrogen detection
AU - Nishibori, Maiko
AU - Shin, Woosuck
AU - Houlet, Lionel F.
AU - Tajima, Kazuki
AU - Itoh, Toshio
AU - Izu, Noriya
AU - Murayama, Norimitsu
AU - Matsubara, Ichiro
PY - 2006
Y1 - 2006
N2 - Thermoelectric hydrogen sensor (THS) is a promising candidate for a hydrogen leak alarm system because of its unique, reliable working principle and its performance has been improved by fabricating it as a micro-device. In this study, we have investigated the performance of a micro-THS with new design of 4 × 4 mm2 chip. The integration of a thermoelectric thin film of B-dope SiGe and a ceramic catalyst of Pt 40 mass% loaded alumina into a micro hot-plate on a thin membrane, has improved its performance. We have demonstrated that the micro-THS detected the wide range of H2 concentration in air from low as 0.5 ppm to high as 5 vol%.
AB - Thermoelectric hydrogen sensor (THS) is a promising candidate for a hydrogen leak alarm system because of its unique, reliable working principle and its performance has been improved by fabricating it as a micro-device. In this study, we have investigated the performance of a micro-THS with new design of 4 × 4 mm2 chip. The integration of a thermoelectric thin film of B-dope SiGe and a ceramic catalyst of Pt 40 mass% loaded alumina into a micro hot-plate on a thin membrane, has improved its performance. We have demonstrated that the micro-THS detected the wide range of H2 concentration in air from low as 0.5 ppm to high as 5 vol%.
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U2 - 10.2109/jcersj.114.853
DO - 10.2109/jcersj.114.853
M3 - Article
AN - SCOPUS:33749409482
VL - 114
SP - 853
EP - 856
JO - Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan
JF - Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan
SN - 1882-0743
IS - 1334
ER -