Nickel metal induced lateral crystallization of patterned amorphous silicon thin film

Gou Nakagawa, Tanemasa Asano

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

Metal-induced lateral crystallization (MILC) of patterned amorphous silicon(a-Si) thin film using Ni as a catalyst has been investigated. Ni-MILC grains are based on the growth of needle-like crystals due to the migration of NiSi2 precipitates, which located at the crystalline front, along the <111> directions. In the case where the needle-like crystallites collided at the a-Si pattern edge, not only "turn" or "branch" of the needle-like crystallites toward one of the possible <111> directions but also the growth along the pattern edge were observed. By limiting the growth area, the competitive growth of dendrite crystals that originated in needle-like crystallites was found to appear. This phenomenon resulted in the orientation alignment of MILC crystals in a wide area. Besides, the grain-filtering of MILC crystals was found to be possible by narrowing the pattern width.

Original languageEnglish
Title of host publicationSelected, peer reviewed papers from The Sixth Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6
Pages1149-1152
Number of pages4
EditionPART 2
Publication statusPublished - Dec 1 2007
Event6th Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6 - Jeju, Korea, Republic of
Duration: Nov 5 2007Nov 9 2007

Publication series

NameMaterials Science Forum
NumberPART 2
Volume561-565
ISSN (Print)0255-5476

Other

Other6th Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6
CountryKorea, Republic of
CityJeju
Period11/5/0711/9/07

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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