TY - GEN
T1 - Nickel metal induced lateral crystallization of patterned amorphous silicon thin film
AU - Nakagawa, Gou
AU - Asano, Tanemasa
PY - 2007/12/1
Y1 - 2007/12/1
N2 - Metal-induced lateral crystallization (MILC) of patterned amorphous silicon(a-Si) thin film using Ni as a catalyst has been investigated. Ni-MILC grains are based on the growth of needle-like crystals due to the migration of NiSi2 precipitates, which located at the crystalline front, along the <111> directions. In the case where the needle-like crystallites collided at the a-Si pattern edge, not only "turn" or "branch" of the needle-like crystallites toward one of the possible <111> directions but also the growth along the pattern edge were observed. By limiting the growth area, the competitive growth of dendrite crystals that originated in needle-like crystallites was found to appear. This phenomenon resulted in the orientation alignment of MILC crystals in a wide area. Besides, the grain-filtering of MILC crystals was found to be possible by narrowing the pattern width.
AB - Metal-induced lateral crystallization (MILC) of patterned amorphous silicon(a-Si) thin film using Ni as a catalyst has been investigated. Ni-MILC grains are based on the growth of needle-like crystals due to the migration of NiSi2 precipitates, which located at the crystalline front, along the <111> directions. In the case where the needle-like crystallites collided at the a-Si pattern edge, not only "turn" or "branch" of the needle-like crystallites toward one of the possible <111> directions but also the growth along the pattern edge were observed. By limiting the growth area, the competitive growth of dendrite crystals that originated in needle-like crystallites was found to appear. This phenomenon resulted in the orientation alignment of MILC crystals in a wide area. Besides, the grain-filtering of MILC crystals was found to be possible by narrowing the pattern width.
UR - http://www.scopus.com/inward/record.url?scp=38349102834&partnerID=8YFLogxK
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M3 - Conference contribution
AN - SCOPUS:38349102834
SN - 0878494626
SN - 9780878494620
T3 - Materials Science Forum
SP - 1149
EP - 1152
BT - Selected, peer reviewed papers from The Sixth Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6
T2 - 6th Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6
Y2 - 5 November 2007 through 9 November 2007
ER -