Noncontact nanometric positioning of probe tip for measurement of mechanical parameters of cell

S. Sakuam, F. Arai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

This paper presents noncontact nanometric positioning of probe tip in a bio-chip. To obtain mN order force, we employed magnetically driven microtools. To realize nanometric resolution in positioning the probe tip, we proposed the reduction mechanism. This mechanism utilizes the serially-connected springs with different stiffness, and is driven by magnetic force. Probe features are shown as follows: (1) probe is actuated in a microfluidic chip, (2) high power and high resolution in positioning, (3) robust from disturbance by employing parallel plate structure, and (4) chip part is disposable. In this paper we developed on-chip nanometric probe with reduction mechanism. The performance of the probe was examined. We succeeded in nanometric order non-contact actuation of on-chip probe by using reduction mechanism.

Original languageEnglish
Title of host publication2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Pages1073-1076
Number of pages4
DOIs
Publication statusPublished - 2012
Externally publishedYes
Event2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, France
Duration: Jan 29 2012Feb 2 2012

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
CountryFrance
CityParis
Period1/29/122/2/12

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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