Noncontact nanometric positioning of probe tip for measurement of mechanical parameters of cell

S. Sakuam; F. Arai

doi:10.1109/MEMSYS.2012.6170257

Noncontact nanometric positioning of probe tip for measurement of mechanical parameters of cell

S. Sakuam, F. Arai

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Citations (Scopus)

Abstract

This paper presents noncontact nanometric positioning of probe tip in a bio-chip. To obtain mN order force, we employed magnetically driven microtools. To realize nanometric resolution in positioning the probe tip, we proposed the reduction mechanism. This mechanism utilizes the serially-connected springs with different stiffness, and is driven by magnetic force. Probe features are shown as follows: (1) probe is actuated in a microfluidic chip, (2) high power and high resolution in positioning, (3) robust from disturbance by employing parallel plate structure, and (4) chip part is disposable. In this paper we developed on-chip nanometric probe with reduction mechanism. The performance of the probe was examined. We succeeded in nanometric order non-contact actuation of on-chip probe by using reduction mechanism.

Original language	English
Title of host publication	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Pages	1073-1076
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2012.6170257
Publication status	Published - 2012
Externally published	Yes
Event	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, France Duration: Jan 29 2012 → Feb 2 2012

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Country/Territory	France
City	Paris
Period	1/29/12 → 2/2/12

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2012.6170257

Cite this

Sakuam, S., & Arai, F. (2012). Noncontact nanometric positioning of probe tip for measurement of mechanical parameters of cell. In 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 (pp. 1073-1076). [6170257] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2012.6170257

Noncontact nanometric positioning of probe tip for measurement of mechanical parameters of cell. / Sakuam, S.; Arai, F.

2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012. 2012. p. 1073-1076 6170257 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Sakuam, S & Arai, F 2012, Noncontact nanometric positioning of probe tip for measurement of mechanical parameters of cell. in 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012., 6170257, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1073-1076, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012, Paris, France, 1/29/12. https://doi.org/10.1109/MEMSYS.2012.6170257

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abstract = "This paper presents noncontact nanometric positioning of probe tip in a bio-chip. To obtain mN order force, we employed magnetically driven microtools. To realize nanometric resolution in positioning the probe tip, we proposed the reduction mechanism. This mechanism utilizes the serially-connected springs with different stiffness, and is driven by magnetic force. Probe features are shown as follows: (1) probe is actuated in a microfluidic chip, (2) high power and high resolution in positioning, (3) robust from disturbance by employing parallel plate structure, and (4) chip part is disposable. In this paper we developed on-chip nanometric probe with reduction mechanism. The performance of the probe was examined. We succeeded in nanometric order non-contact actuation of on-chip probe by using reduction mechanism.",

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Noncontact nanometric positioning of probe tip for measurement of mechanical parameters of cell

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