@inproceedings{2e2f1122e44644ca978353dc0e28765e,
title = "Novel CMP technique for copper surface finishing with fullerene nano-particle",
author = "Hiroki Tanada and Takashi Miyoshi and Yasuhiro Takaya and Terutake Hayashi and Keisuke Suzuki",
year = "2006",
language = "English",
isbn = "1887706410",
series = "Proceedings of the 21st Annual ASPE Meeting, ASPE 2006",
booktitle = "Proceedings of the 21st Annual ASPE Meeting, ASPE 2006",
note = "21st Annual Meeting of the American Society for Precision Engineering, ASPE 2006 ; Conference date: 15-10-2006 Through 20-10-2006",
}