Novel fabrication method for transparent conducting oxide films utilizing solid-phase crystallized seed layers

Naho Itagaki, Kazunari Kuwahara, Kenta Nakahara

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

High quality ZnO:Al (AZO) films have been obtained by our novel fabrication method utilizing solid-phase crystallized (SPC) seed layers. The crystal grain size of AZO films with seed layers is 5 times larger than that of conventional films, which is due to the low nuclei density of seed layers. As a result, the resistivity of AZO films of 18 nm in total film thickness is drastically reduced from 40×10-4Ωcm for the conventional films to 5×10-4Ωcm for our films. No differences in transparency hve been observed between AZO films with and without seed layers and their optical transmittance is higher than 80% in a wide wavelength range of 400-2500 nm. These results reveal that our method is very promising for fabrication of transparent conducting oxide films. Our method opens up a new avenue for oxide fabrications of nm thick films with excellent crystallinity, because it can be easily extended to other oxides whose amorphous phase is difficult to obtain.

Original languageEnglish
Title of host publicationInternational Conference on Advances in Condensed and Nano Materials, ICACNM-2011
Pages23-26
Number of pages4
DOIs
Publication statusPublished - Dec 29 2011
EventInternational Conference on Advances in Condensed and Nano Materials, ICACNM-2011 - Chandigarh, India
Duration: Feb 23 2011Feb 26 2011

Publication series

NameAIP Conference Proceedings
Volume1393
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616

Other

OtherInternational Conference on Advances in Condensed and Nano Materials, ICACNM-2011
CountryIndia
CityChandigarh
Period2/23/112/26/11

Fingerprint

oxide films
solid phases
seeds
conduction
fabrication
oxides
thick films
crystallinity
transmittance
film thickness
grain size
electrical resistivity
nuclei
wavelengths
crystals

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

Cite this

Itagaki, N., Kuwahara, K., & Nakahara, K. (2011). Novel fabrication method for transparent conducting oxide films utilizing solid-phase crystallized seed layers. In International Conference on Advances in Condensed and Nano Materials, ICACNM-2011 (pp. 23-26). (AIP Conference Proceedings; Vol. 1393). https://doi.org/10.1063/1.3653599

Novel fabrication method for transparent conducting oxide films utilizing solid-phase crystallized seed layers. / Itagaki, Naho; Kuwahara, Kazunari; Nakahara, Kenta.

International Conference on Advances in Condensed and Nano Materials, ICACNM-2011. 2011. p. 23-26 (AIP Conference Proceedings; Vol. 1393).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Itagaki, N, Kuwahara, K & Nakahara, K 2011, Novel fabrication method for transparent conducting oxide films utilizing solid-phase crystallized seed layers. in International Conference on Advances in Condensed and Nano Materials, ICACNM-2011. AIP Conference Proceedings, vol. 1393, pp. 23-26, International Conference on Advances in Condensed and Nano Materials, ICACNM-2011, Chandigarh, India, 2/23/11. https://doi.org/10.1063/1.3653599
Itagaki N, Kuwahara K, Nakahara K. Novel fabrication method for transparent conducting oxide films utilizing solid-phase crystallized seed layers. In International Conference on Advances in Condensed and Nano Materials, ICACNM-2011. 2011. p. 23-26. (AIP Conference Proceedings). https://doi.org/10.1063/1.3653599
Itagaki, Naho ; Kuwahara, Kazunari ; Nakahara, Kenta. / Novel fabrication method for transparent conducting oxide films utilizing solid-phase crystallized seed layers. International Conference on Advances in Condensed and Nano Materials, ICACNM-2011. 2011. pp. 23-26 (AIP Conference Proceedings).
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