Novel in situ method to detect subnanometer-sized particles in plasmas and its application to particles in helium-diluted silane radio frequency plasmas

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Abstract

A new Langmuir probe method is proposed to reveal processes of particulate nucleation and its subsequent early growth in silane radio frequency (rf) plasmas. In the method, subnanometer-sized particles grown during the rf-discharge-on phase are detected as negative ions in the subsequent afterglow phase in which temperature and density of electrons have decayed. Preliminary experiments applying the method to helium-diluted silane rf plasmas have the following features of particle growth: subnanometer-sized particles are mainly generated around the plasma/sheath boundary near the rf electrode; they grow with increase in the rf-discharge-on period, Ton, for T on≲a gas residence time of the discharge.

Original languageEnglish
Pages (from-to)3098-3100
Number of pages3
JournalApplied Physics Letters
Volume64
Issue number23
DOIs
Publication statusPublished - Dec 1 1994

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All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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