Novel microscopy using stimulated light scattering by laser-induced transient reflecting gratings on metallic surfaces

Akira Harata, Tsuguo Sawada

Research output: Contribution to journalArticle

16 Citations (Scopus)

Abstract

A novel microscopic method, based on the technique of laser-induced transient reflecting gratings, is proposed to monitor ion implantation in silicon by noncontact and nondestructive ways. Some unique advantages of this technique, such as high sensitivity to ion dose and potential real time imaging capability, are demonstrated.

Original languageEnglish
Pages (from-to)1839-1841
Number of pages3
JournalApplied Physics Letters
Volume58
Issue number17
DOIs
Publication statusPublished - Dec 1 1991
Externally publishedYes

Fingerprint

ion implantation
light scattering
gratings
microscopy
dosage
sensitivity
silicon
lasers
ions

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

Cite this

Novel microscopy using stimulated light scattering by laser-induced transient reflecting gratings on metallic surfaces. / Harata, Akira; Sawada, Tsuguo.

In: Applied Physics Letters, Vol. 58, No. 17, 01.12.1991, p. 1839-1841.

Research output: Contribution to journalArticle

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