To improve the performance of an X-ray nanobeam, we demonstrate the in situ determination and correction of the figure error of an elliptical mirror. The phase error profile on the mirror surface, which represents the figure error, is numerically reconstructed from the X-ray intensity distribution measured at the focal plane. The figure error is corrected by depositing a Pt film on the surface with subnanometer thickness controllability. Results of focusing experiments and subsequent analysis show a great improvement in focusing performance.
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)