Novel scheme of figure-error correction for X-ray nanofocusing mirror

Soichiro Handa, Hidekazu Mimura, Hirokatsu Yumoto, Takashi Kimura, Satoshi Matsuyama, Yasuhisa Sano, Kazuya Yamamura, Kenji Tamasaku, Yoshinori Nishino, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Research output: Contribution to journalArticle

1 Citation (Scopus)


To improve the performance of an X-ray nanobeam, we demonstrate the in situ determination and correction of the figure error of an elliptical mirror. The phase error profile on the mirror surface, which represents the figure error, is numerically reconstructed from the X-ray intensity distribution measured at the focal plane. The figure error is corrected by depositing a Pt film on the surface with subnanometer thickness controllability. Results of focusing experiments and subsequent analysis show a great improvement in focusing performance.

Original languageEnglish
Pages (from-to)965071-965074
Number of pages4
JournalJapanese journal of applied physics
Issue number9 Part 1
Publication statusPublished - Dec 1 2009
Externally publishedYes


All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Handa, S., Mimura, H., Yumoto, H., Kimura, T., Matsuyama, S., Sano, Y., ... Yamauchi, K. (2009). Novel scheme of figure-error correction for X-ray nanofocusing mirror. Japanese journal of applied physics, 48(9 Part 1), 965071-965074.