Nucleation and growth kinetics of AIN films on atomically smooth 6H-SiC (0001) surfaces

Satoshi Yamada, Jun Ichi Kato, Satoru Tanaka, Ikuo Suemune, Adrian Avramescu, Yoshinobu Aoyagi, Nobuaki Teraguchi, Akira Suzuki

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51 Citations (Scopus)

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Physics & Astronomy