Numerical analysis of effects of crystal and crucible rotations on melt-crystal interface shape and melt flow in CZ growth by global simulation

Lijun Liu, Tomonori Kitashima, Koichi Kakimoto

Research output: Contribution to journalArticle

Abstract

The melt-crystal interface shape and melt flow in the crucible play an important role in control of the crystal quality in Czochralski (CZ) growth. A set of numerical computations was conducted to understand the effects of crystal and crucible rotations on the melt-crystal interface shape and melt flow in a small silicon CZ furnace. The crystal rotation rates ranged from 0 to 30 r/min and the crucible rotation rates from 0 to -10 r/min. A global simulation was employed to obtain a precise knowledge of the heat transfer taking place in the entire furnace. An accurate calculation of radiation exchange between different surfaces in the furnace was carried out with the assumption of diffuse surfaces and with the use of a viewed and hidden part algorithm. A finite control volume method, together with a multi-block technique, was applied to calculate the thermal field in solid domains and flow field of melt in the crucible. The shape of the melt-crystal interface and the heater power of the furnace are variables of the problem and were achieved by iterative procedures. The computations revealed that the crystal and crucible rotations affect the melt flow and melt-crystal interface shape.

Original languageEnglish
Pages (from-to)12-19
Number of pages8
JournalRare Metals
Volume22
Issue numberSUPPL.
Publication statusPublished - Dec 1 2003

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Physical and Theoretical Chemistry
  • Metals and Alloys
  • Materials Chemistry

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