TY - JOUR
T1 - Numerical analysis of the formation of Si3N4 and Si2N2O during a directional solidification process in multicrystalline silicon for solar cells
AU - Hisamatsu, Sho
AU - Matsuo, Hitoshi
AU - Nakano, Satoshi
AU - Kakimoto, Koichi
N1 - Funding Information:
We are grateful to Associate Prof. Y. Kangawa at Kyushu University for his guidance. This work was supported by a NEDO project, a Grant-in-Aid for Science Research (B) 19360012 and a Grant-in-Aid for the creation of innovation through business-academy-public sector from the Japanese Ministry of Education, Science, Sports and Culture.
PY - 2009/4/15
Y1 - 2009/4/15
N2 - We studied the mechanism of formation of Si3N4 and Si2N2O during the solidification process of multicrystalline silicon by numerical analysis with a phase diagram of the Si(l)-N-O system. Concentrations of oxygen and nitrogen were almost the same as reported values of measurements. Si3N4 was formed on the top of the silicon ingot. Si3N4 was also formed at the middle stage of the solidification process at the center of the ingot. It was clarified from the results that Si2N2O was first formed near the melt-crystal interface, since oxygen concentration in the melt decreases and nitrogen concentration in the melt increases with solidification of the molten silicon. Si3N4 was formed after Si2N2O had been formed.
AB - We studied the mechanism of formation of Si3N4 and Si2N2O during the solidification process of multicrystalline silicon by numerical analysis with a phase diagram of the Si(l)-N-O system. Concentrations of oxygen and nitrogen were almost the same as reported values of measurements. Si3N4 was formed on the top of the silicon ingot. Si3N4 was also formed at the middle stage of the solidification process at the center of the ingot. It was clarified from the results that Si2N2O was first formed near the melt-crystal interface, since oxygen concentration in the melt decreases and nitrogen concentration in the melt increases with solidification of the molten silicon. Si3N4 was formed after Si2N2O had been formed.
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U2 - 10.1016/j.jcrysgro.2009.02.018
DO - 10.1016/j.jcrysgro.2009.02.018
M3 - Article
AN - SCOPUS:65349132351
SN - 0022-0248
VL - 311
SP - 2615
EP - 2620
JO - Journal of Crystal Growth
JF - Journal of Crystal Growth
IS - 9
ER -